飞秒激光脉冲能量累积优化对黑硅表面形貌的影响

发布时间：2018-11-08 13:43

【摘要】：在黑硅表面制备的微结构可以使其获得多种表面功能,这些功能在太阳能、探测器等领域具有广泛的应用.因此,黑硅微结构的形成机理及制备条件优化一直是研究关注的焦点.本文的研究发现,随着激光辐照量(提高单脉冲能量或增加积累脉冲数)的增加会遇到形貌尺寸生长的瓶颈效应:过多的能量累积对微结构的优化和控制并没有进一步的作用.理论计算结果表明,产生这一现象的原因是前序飞秒激光脉冲诱导产生的微结构形貌对当前激光脉冲能量的吸收产生了调制,使当前激光脉冲的有效烧蚀效率降低.根据这一飞秒激光烧蚀规律,提出了一种优化表面形貌的新方案——在辐照激光总能量一定的条件下,通过改变激光能量的分配方式(单脉冲能量与脉冲数的组合)可实现表面形貌的优化.这一新的工作方式不但可以提高黑硅的制备效率,而且还有助于减少飞秒加工过程带来的表面缺陷及损伤,并降低加工过程中的能源消耗.这一研究成果对黑硅性能的进一步提升及其工程应用具有重要的意义.
[Abstract]:The microstructure prepared on the surface of black silicon can obtain many kinds of surface functions, which have been widely used in solar energy, detector and other fields. Therefore, the formation mechanism and preparation conditions of black silicon microstructures have been the focus of attention. It is found that with the increase of laser irradiation (increasing the energy of single pulse or increasing the number of accumulated pulses), the bottleneck effect of morphology size growth will be encountered: too much energy accumulation has no further effect on the optimization and control of microstructure. The theoretical calculation results show that this phenomenon is caused by the modulation of the energy absorption of the current laser pulse by the microstructure induced by the front sequence femtosecond laser pulse, which reduces the effective ablation efficiency of the current laser pulse. According to this law of femtosecond laser ablation, a new scheme for optimizing the surface morphology is proposed, under the condition that the total energy of irradiated laser is constant. The surface morphology can be optimized by changing the distribution of laser energy (the combination of single pulse energy and pulse number). This new method can not only improve the preparation efficiency of black silicon, but also reduce the surface defects and damage caused by femtosecond processing, and reduce the energy consumption in the process. This research result is of great significance to the further improvement of black silicon properties and its engineering application.
【作者单位】：长春理工大学理学院;光电信息控制和安全技术重点实验室;
【基金】：国家自然科学基金(批准号:61605017) 长春市科技计划(批准号:14KP007) 长春理工大学青年科学基金(批准号:XQNJJ-2015-01) 光电信息控制和安全技术重点实验室基金资助的课题~~
【分类号】：TN249;TN304.12

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