硅胶基衬底表面高分辨复杂可延展电路的印刷制备

发布时间：2018-11-18 09:48

【摘要】：柔性可延展电子因其能够适应非平面工作环境,将突破现有电子器件的应用范围,促进信息与人的融合,在智能穿戴电子、柔性显示、生物医疗等领域具有广阔的应用前景。本文提出利用印刷结合真空抽滤方法实现硅胶基衬底表面高分辨复杂可延展电路的制备;研究了丝网印刷工艺实现微孔滤膜表面银纳米线(Ag NWs)图形化沉积的分辨率;讨论了Ag NWs线长、抽滤真空度等因素对沉积分辨率的影响,实现了Ag NWs图形化50μm线径分辨率及间隔分辨率。本文还研究了硅胶基衬底表面微电极的电阻均一性及拉伸电阻稳定性,并结合电极表面微结构的变化详细讨论了屈曲褶皱结构的出现对微电极拉伸电阻的影响,实现了100μm线宽微电极100%拉伸幅度下电阻增加仅为初始值的40%。最后,通过集成LED芯片演示了面料基底表面柔性可延展发光电路。本研究对于柔性可延展电路的制备提供了新的思路。
[Abstract]:Flexible extensible electron can adapt to the non-planar working environment, it will break through the application range of the existing electronic devices, promote the fusion of information and human, and have a broad application prospect in the fields of smart wearable electronics, flexible display, biomedicine and so on. In this paper, the high resolution complex and extensible circuit on the surface of silica gel substrate is fabricated by using the method of printing and vacuum filtration, the resolution of silver nanowire (Ag NWs) on the surface of microporous filter membrane is studied by screen printing technology. The influence of Ag NWs line length and vacuum degree on the deposition resolution is discussed. The 50 渭 m diameter resolution and interval resolution of Ag NWs are realized. The resistance uniformity and tensile resistance stability of the microelectrode on the silica gel substrate are also studied. The influence of the appearance of the buckling fold structure on the tensile resistance of the microelectrode is discussed in detail according to the change of the microstructure on the surface of the electrode. The resistance increase of 100 渭 m linewidth microelectrode with 100% tensile amplitude is only 40% of the initial value. Finally, the flexible and extensible luminescent circuit of fabric substrate surface is demonstrated by integrated LED chip. This study provides a new idea for the fabrication of flexible extensible circuits.
【作者单位】：中国科学院苏州纳米技术与纳米仿生研究所印刷电子技术中心;
【基金】：国家重点基础研究计划(973计划)项目(2015CB351900) 国家自然科学基金青年科学基金项目(51603227)
【分类号】：TN41

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