激光大尺度三维动态扫描加工系统研究

发布时间：2018-11-24 13:00

【摘要】：随着激光技术的发展,激光由于其特殊的优异性质在很多领域展现了无与伦比的优势。激光微加工是激光加工应用中的一个重要研究方向。我国目前的激光微加工研究集中在基于平面上进行的各种精微加工领域。随着激光微加工应用的不断深入,对于三维结构或工件进行微加工的要求越来越迫切。依靠现有的二维和准三维方式很难实现高速高精度的三维精微加工。因此,发展一种三维扫描加工系统对于扩展激光微加工的应用领域,提高我国激光微加工技术,缩短与发达国家激光应用技术水平的差距具有重要意义。提出将激光动态聚焦系统整合进激光微加工系统中的方案,对现有激光准三维加工系统进行分析,通过计算、设计和ZEMAX模拟,设计了搭载于现有激光准三维微加工系统的动态聚焦镜。实现了激光大尺度三维动态加工系统,激光三维扫描加工范围达到150mm×150mm×50mm,激光焦斑直径小于10um。本文从传统的激光二维和三维加工技术入手,介绍了当前激光三维加工技术的现状和三维加工系统的不足。然后介绍了动态聚焦扫描系统的原理,包括分析二维振镜扫描原理,介绍动态聚焦镜光杠杆原理。并在此分析的初上,详细介绍了基于ZEMAX的远心F-Theta镜、动态聚焦镜光学设计。选定音圈电机作为动态聚焦镜驱动机构并切实搭建了激光大尺度三维动态扫描加工系统,提出了动态聚焦扫描系统的两种扫描方式-准三维动态聚焦扫描和三维联动动态聚焦扫描。通过实验研究了本系统的动态聚焦特性,对两种扫描方式进行了实验验证。
[Abstract]:With the development of laser technology, laser has shown unparalleled advantages in many fields because of its special excellent properties. Laser micromachining is an important research direction in the application of laser processing. At present, the research of laser micromachining in China is focused on various fine machining fields based on plane. With the development of laser micromachining, the requirement of 3D structure or workpiece micromachining is becoming more and more urgent. It is difficult to realize high-speed and high-precision three-dimensional micro machining by existing two-dimensional and quasi-three-dimensional methods. Therefore, it is of great significance to develop a 3D scanning machining system for expanding the application field of laser micromachining, improving the technology of laser micromachining in China, and shortening the gap between China and the developed countries in the level of laser application technology. The scheme of integrating laser dynamic focusing system into laser micromachining system is put forward. The existing laser quasi-three-dimensional machining system is analyzed, and through calculation, design and ZEMAX simulation, A dynamic focusing mirror mounted on the existing laser quasi-three-dimensional micromachining system is designed. The laser large scale 3D dynamic machining system is realized. The laser scanning range is 150mm 脳 150mm 脳 50mm, and the laser focal spot diameter is less than 10um. In this paper, the current situation of laser 3D machining technology and the deficiency of 3D machining system are introduced, starting with the traditional two dimensional and three dimensional laser machining techniques. Then the principle of dynamic focusing scanning system is introduced, including analyzing the scanning principle of two dimensional vibroscope and introducing the principle of optical lever of dynamic focusing mirror. At the beginning of this analysis, the optical design of telecentric F-Theta mirror and dynamic focusing mirror based on ZEMAX is introduced in detail. The sound coil motor is chosen as the driving mechanism of the dynamic focusing mirror and the laser large scale 3D dynamic scanning machining system is built. In this paper, two kinds of scanning methods of dynamic focusing scanning system, namely, quasi-3D dynamic focusing scanning and three dimensional linkage dynamic focusing scanning, are proposed. The dynamic focusing characteristics of the system are studied experimentally, and the two scanning methods are verified experimentally.
【学位授予单位】：华中科技大学
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：TN249

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