薄膜体声波谐振器横向杂散模式三维仿真分析
发布时间：2018-12-12 13:51
【摘要】：利用有限元分析软件ANSYS建立了FBAR三维振动模型,分析了不同有效区域形状(方形、圆形、非正五边形)、不同有效区域面积(10 000μm~2、15 625μm~2、22 500μm~2、30 625μm~2、40 000μm~2)和不同压电层材料(AlN、ZnO)对其横向杂散模式的影响,得到了阻抗特性曲线及不圆度(NC)。有效区域形状为非正五边形时,得到最平滑的阻抗曲线和最小的NC值为0.015 1;有效区域面积为40 000μm~2时得到最小的NC值为0.005 5;在相同谐振频率(1.76GHz)下,用ZnO作压电材料时得到较小的NC值为0.012 9。
[Abstract]:The three-dimensional vibration model of FBAR was established by using the finite element analysis software ANSYS. The shapes of different effective regions (square, circular, non-normal pentagonal), the effective area of different effective areas (10 000 渭 m ~ 2 15 625 渭 m) and different piezoelectric layer materials (AlN,) were analyzed by using the finite element analysis software ANSYS. The impedance characteristic curve and non-circular degree (NC). Were obtained by the influence of ZnO on its transverse stray mode. The smoothest impedance curve and the minimum NC value are obtained when the shape of the effective region is irregular pentagonal, and the minimum NC value is 0.005 5 when the effective region area is 40 000 渭 m ~ 2. At the same resonant frequency (1.76GHz), a smaller NC value of 0.012 9 is obtained when ZnO is used as piezoelectric material.
【作者单位】： 中国科学院声学研究所声场声信息国家重点实验室;
【基金】：国家自然科学基金资助项目(11374327)
【分类号】：TN65
，
本文编号：2374692
[Abstract]:The three-dimensional vibration model of FBAR was established by using the finite element analysis software ANSYS. The shapes of different effective regions (square, circular, non-normal pentagonal), the effective area of different effective areas (10 000 渭 m ~ 2 15 625 渭 m) and different piezoelectric layer materials (AlN,) were analyzed by using the finite element analysis software ANSYS. The impedance characteristic curve and non-circular degree (NC). Were obtained by the influence of ZnO on its transverse stray mode. The smoothest impedance curve and the minimum NC value are obtained when the shape of the effective region is irregular pentagonal, and the minimum NC value is 0.005 5 when the effective region area is 40 000 渭 m ~ 2. At the same resonant frequency (1.76GHz), a smaller NC value of 0.012 9 is obtained when ZnO is used as piezoelectric material.
【作者单位】： 中国科学院声学研究所声场声信息国家重点实验室;
【基金】：国家自然科学基金资助项目(11374327)
【分类号】：TN65
，
本文编号：2374692
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