碲镉汞红外探测器增透结构设计

发布时间：2019-03-22 07:22

【摘要】：针对工作在涵盖甚长波段的碲镉汞红外探测器,设计较薄的光学膜层或光学结构实现反射率低于10%的减反效果,分为减反膜系和类光子晶体两种设计。基于光学薄膜理论设计并分别用两种算法优化得到了3层和4层ZnS/YbF_3增透膜。经过模拟计算,设计的减反膜在8~16μm的宽光谱波段范围内能大幅度减少红外探测器表面的反射,平均反射率低于5%,并且在0°~60°入射角范围内都具有明显的减反效果。另外,通过类光子晶体的周期性纳米柱结构设计,得到了在14~16μm波段平均反射率低于5%的设计方案。两种方案提供了不同思路的甚长波减反设计,减反膜系相对简单廉价,易于大规模生产;类光子晶体设计,生产技术要求较高,但性质更加稳定可靠。
[Abstract]:For the HgCdTe infrared detector operating in a very long band, a thin optical layer or an optical structure is designed to achieve a reflection reduction effect of less than 10%, which is divided into two designs: anti-reflection film system and photonic-like crystal design. Based on the optical thin film theory, three and four layers of ZnS/YbF_3 antireflection films were optimized by two kinds of algorithms. Through simulation calculation, the designed antireflection film can greatly reduce the reflection of infrared detector surface in the wide spectral band of 8 ~ 16 渭 m, the average reflectivity is less than 5%, and it has obvious anti-reflection effect in the range of 0 掳~ 60 掳incidence angle. In addition, the design scheme with an average reflectivity of less than 5% in the band of 14 ~ 16 渭 m has been obtained through the periodic nanocolumn structure design of photonic-like crystals. The two schemes provide a very long wave reduction design with different ideas. The antireflective film system is relatively simple and cheap and easy to be produced on a large scale, and the photonic-like crystal design requires higher technical requirements, but the properties are more stable and reliable.
【作者单位】：复旦大学信息科学与工程学院上海超精密光学制造工程技术研究中心;中国科学院上海技术物理研究所中国科学院红外成像材料与器件重点实验室;
【基金】：国家自然科学基金项目(11174058) 国家科技重大专项课题(2011ZX02109-004) 复旦大学精品课程建设项目、望道项目中国科学院红外成像材料与器件重点实验室开放基金资助
【分类号】：TN215

【参考文献】