基于无穷刚度和零刚度复合作用的主动负刚度隔微振技术

发布时间：2019-03-25 21:26

【摘要】：主动隔微振技术因其优良的低频性能而成为抑制光刻机内部微振动的核心技术之一。微振动直接影响光刻机超精密运动平台的定位精度和计量框架的稳定性,最终制约光刻机最小线宽和套刻精度的提升。微振动干扰包括基础振动和直接干扰两大类。基于零刚度原理的传统隔微振技术可有效隔离基础振动,但会弱化系统对直接干扰的抑制能力。因此,当基础振动和直接干扰对系统的影响在同一量级时,传统方法必须权衡二者的影响,从而无法有效抑制光刻机内部微振动。基础振动隔离和直接干扰抑制难以兼顾的问题已成为提升光刻机隔微振性能的主要技术瓶颈。本文旨在解决光刻机隔微振技术中基础振动隔离和直接干扰抑制难以兼顾的问题。为此,首先提出了一种基于干扰均方根响应的反馈量配置优化方法,以获取反馈量的最优配置和反馈系数的最优值;其次提出了一种基于无穷刚度和零刚度复合作用的主动负刚度隔微振方法,以兼顾基础振动隔离和直接干扰抑制;最后提出了一种面向力反馈主动隔微振致动器的干扰力自感知方法,直接测量并实时补偿干扰力,以抑制直接干扰。本文主要研究内容详述如下:针对多因素干扰同时作用时反馈量配置的优化问题,提出了一种基于干扰均方根响应的反馈量配置优化方法,分析了单自由度主动隔振模型下各直接反馈量及其组合的隔振性能。该方法以干扰均方根响应值作为评价振动水平的单一指标,通过建立以反馈量系数、干扰功率谱密度为自变量,干扰均方根响应值为因变量的函数关系,定量分析了反馈量配置以及各干扰对振动水平的影响。利用该方法确定了反馈量的系数最优值,并且明确了基础振动和直接干扰在被隔振设备振动有效值中各自的权重。针对基于零刚度原理的主动负刚度隔微振方法难以兼顾基础振动隔离和直接干扰抑制的问题,本文提出了一种基于无穷刚度和零刚度复合作用的主动负刚度隔微振方法。该方法通过绝对位移反馈主动负刚度实现了无穷刚度和零刚度复合控制,使被隔振设备与参考点、基础之间的等效刚度分别趋于无穷大和零,等价于将被隔振设备刚性连接在参考点之上,并使其与基础(振源)完全隔离,兼顾了直接干扰的抑制和基础振动的隔离。分析结果表明,该方法可有效降低被隔振设备的振动水平。针对柔性设备隔振时干扰力测不准的问题,提出了一种面向力反馈主动隔微振致动器的干扰力自感知方法。该方法利用自感知型致动器的双向换能特性,直接测量并实时补偿干扰力。通过优化致动器的驱动线圈结构,提升了磁场分布的均匀性,并利用基于有源开尔文电桥原理的干扰自感知电路实现了自感知电压的线性提取。分析结果表明,该方法可实现干扰力自感知。最后,搭建实验平台,对本文提出的隔微振方法进行了实验验证。结果表明:均方根响应法合成的设备振动速度有效值与实测值的误差小于7.7%,验证了该方法的可行性;随机激励条件下,应用复合作用主动负刚度隔微振方法后,被隔振设备的振动速度有效值比被动隔微振方法降低了21.7%,比零刚度原理隔微振方法降低了8.4%;致动器对干扰力的自感知灵敏度系数优于2.0(mV·s)/N,实现了干扰力自感知。
[Abstract]:Active vibration isolation technology is one of the core technologies for suppressing the internal micro-vibration of the lithography machine because of its excellent low-frequency performance. The micro-vibration directly affects the positioning accuracy of the ultra-precision motion platform of the lithography machine and the stability of the measuring frame, and finally, the minimum line width and the accuracy of the etching of the lithography machine are finally restricted. The micro-vibration interference includes basic vibration and direct interference. The traditional micro-vibration technology based on the principle of zero stiffness can effectively isolate the basic vibration, but weaken the system's ability to suppress the direct interference. Therefore, when the influence of the basic vibration and the direct interference on the system is on the same order, the traditional method has to trade off the influence of the two, so that the internal micro-vibration of the lithography machine can not be effectively suppressed. The problem that the basic vibration isolation and direct interference suppression is difficult to balance has become the main technical bottleneck for improving the microvibration performance of the lithography machine. The purpose of this paper is to solve the problem that the basic vibration isolation and direct interference in the micro-vibration technology of the lithography machine are difficult to balance. In order to obtain the optimal configuration of the feedback quantity and the optimal value of the feedback coefficient, an active negative stiffness and micro-vibration method based on the combination of infinite stiffness and zero stiffness is proposed. In this paper, a self-sensing method for the interference force of a force-feedback active-diaphragm actuator is presented, which can be used to measure and compensate the interference force in real time to suppress direct interference. The main research contents of this paper are as follows: the optimization of the feedback quantity configuration at the same time with respect to the multi-factor interference, and a feedback quantity configuration optimization method based on the interference root mean square response is proposed. The vibration isolation performance of each direct feedback quantity and its combination under the single-degree-of-freedom active vibration isolation model is analyzed. The method uses the interference root-mean-square response value as a single index for evaluating the vibration level, The feedback quantity configuration and the influence of each interference on the vibration level are quantitatively analyzed. The optimal value of the coefficient of the feedback quantity is determined by the method, and the weight of the basic vibration and the direct interference in the effective value of the vibration of the vibration isolation device is determined. In order to solve the problem of vibration isolation and direct interference suppression, an active negative stiffness vibration isolation method based on infinite stiffness and zero stiffness is presented in this paper. The method realizes the compound control of infinite rigidity and zero rigidity through the absolute displacement feedback active negative stiffness, And the isolation of the direct interference and the basic vibration is taken into account. The results show that the method can effectively reduce the vibration level of the vibration isolation equipment. In this paper, a self-sensing method for the interference force of a force-feedback active septum microvibration actuator is presented in view of the uncertainty of the interference force during the vibration isolation of the flexible equipment. The method utilizes the bidirectional energy-changing characteristics of the self-sensing actuator to directly measure and compensate the interference force in real time. By optimizing the drive coil structure of the actuator, the uniformity of the magnetic field distribution is improved, and the linear extraction of the self-sensing voltage is realized by using the interference self-sensing circuit based on the principle of the active Kelvin bridge. The results show that the method can realize the self-sensing of the interference force. Finally, the experiment platform is set up, and the microvibration method proposed in this paper is proved. The results show that the error of the effective value of the vibration velocity and the measured value of the equipment synthesized by the root mean square response method is less than 7.7%, and the feasibility of the method is proved. The effective value of the vibration velocity of the vibration isolation device is 21.7% lower than that of the passive vibration isolation method, and the micro-vibration method is reduced by 8.4% compared with the principle of zero stiffness; the self-sensing sensitivity coefficient of the actuator to the interference force is better than 2.0 (mV 路 s)/ N, and the self-sensing of the interference force is realized.
【学位授予单位】：哈尔滨工业大学
【学位级别】：博士
【学位授予年份】：2017
【分类号】：TN305.7

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