飞秒激光制备微光学元件及其应用

发布时间：2019-03-28 08:59

【摘要】：近年来,微光学元件的制备与应用受到人们的广泛关注。微光学元件体积小、重量轻及制造成本低,并且易于与微机电系统相集成,能够实现普通光学元件难以实现的功能,在光纤通信、信息处理、航空航天、生物医学、激光技术、光计算等领域,突显出重要的应用价值。飞秒激光因其超短的脉冲宽度和超高的瞬时功率,能够实现超高精度的微纳加工,轻松突破衍射极限。飞秒激光加工技术对材料没有选择性,加工过程也非常灵活,可以进行任意复杂结构的加工,丰富了微光学元件的制备种类。飞秒激光还能在现有结构或系统上进行集成加工,极大扩展了微光学元件的应用。简要概述了微光学元件的优点及一些常用的制备方法,同时对飞秒激光加工技术进行了简单概括,对近年来飞秒激光制备各种微光学元件的实验和应用研究进行了综述,最后对微光学元件未来的研究方向进行了预测和展望。
[Abstract]:In recent years, the fabrication and application of micro-optical elements have been paid more and more attention. Micro-optical elements are small in size, light in weight and low in manufacturing cost, and are easy to integrate with MEMS. They can realize functions that ordinary optical elements are difficult to achieve. They are used in optical fiber communication, information processing, aerospace, biomedicine, laser technology, and so on. Optical computing and other fields highlight the important application value. Because of its ultra-short pulse width and ultra-high instantaneous power, femtosecond laser can achieve ultra-high precision micro-nano machining and easily break the diffraction limit. Femtosecond laser processing technology has no selectivity to materials, and the machining process is very flexible, so it can be processed with arbitrary complex structure, which enriches the kinds of fabrication of micro-optical elements. Femtosecond laser can also be integrated into existing structures or systems, greatly expanding the application of micro-optical elements. In this paper, the advantages of micro-optical elements and some common fabrication methods are briefly summarized. Meanwhile, the processing technology of femtosecond laser is briefly summarized, and the experimental and application research on femtosecond laser fabrication of various micro-optical elements in recent years are reviewed. Finally, the future research direction of micro-optical elements is predicted and prospected.
【作者单位】：吉林大学机械科学与工程学院;吉林大学电子科学与工程学院集成光电子学国家重点联合实验室;
【分类号】：TN249

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