高温高压退火对碳化硅性能的影响
发布时间：2019-04-26 23:40
【摘要】：以CVD生产的碳化硅为原料在高温高压下进行退火处理,探究退火温度对碳化硅性能的影响。实验结果表明:随着退火温度的增加,碳化硅的颜色由浅绿色变为无色;体积有明显的缩小、密度增加;退火后碳化硅的抗压强度显著增强,机械强度有所增加;退火后的SiC结构并没有发生变化,15R-SiC在798.6 cm~(-1)处拉曼峰强度减少,4H-SiC在970 cm-1拉曼峰强度有所增强。
[Abstract]:Silicon carbide produced by CVD was annealed at high temperature and high pressure to investigate the effect of annealing temperature on the properties of silicon carbide. The experimental results showed that with the increase of annealing temperature, the color of sic changed from light green to colorless, the volume decreased obviously and the density increased, the compressive strength and mechanical strength of sic increased significantly after annealing. The structure of SiC did not change after annealing. The intensity of Raman peak of 15R-SiC decreased at 798.6 cm~ (- 1), and the intensity of Raman peak of 4H-SiC increased at 970 cm-1.
【作者单位】： 牡丹江师范学院黑龙江省新型碳基功能与超硬材料重点实验室;
【基金】：牡丹江师范学院项目(GG2017001,GP201605,SY2014007) 黑龙江省自然基金(E201341)
【分类号】：TN304.24
，
本文编号：2466493
[Abstract]:Silicon carbide produced by CVD was annealed at high temperature and high pressure to investigate the effect of annealing temperature on the properties of silicon carbide. The experimental results showed that with the increase of annealing temperature, the color of sic changed from light green to colorless, the volume decreased obviously and the density increased, the compressive strength and mechanical strength of sic increased significantly after annealing. The structure of SiC did not change after annealing. The intensity of Raman peak of 15R-SiC decreased at 798.6 cm~ (- 1), and the intensity of Raman peak of 4H-SiC increased at 970 cm-1.
【作者单位】： 牡丹江师范学院黑龙江省新型碳基功能与超硬材料重点实验室;
【基金】：牡丹江师范学院项目(GG2017001,GP201605,SY2014007) 黑龙江省自然基金(E201341)
【分类号】：TN304.24
，
本文编号：2466493
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