新型高性能可见—近红外光电探测器的研究
发布时间：2019-04-28 12:26
【摘要】：当人类第一次睁开眼睛的时候,自然赋予人类的光电探测器“眼睛”,就这样开始工作了。第一个真正意义上的光电探测器是在光电效应提出之后制作出来的。与日俱增的市场需求促使光电探测器的研究快速发展,例如军用设备市场强劲需求导致红外探测的研究和生产快速增长。微电子工艺技术和新材料的迅猛发展,使得光电探测器的探测范围从紫外到红外区域均有大量相关的研究和应用。但是,为了获取更好的性能,更宽的探测范围,研究人员集中精力致力于提高器件性能。本文将着重讨论如何采用拓扑绝缘体材料和采用表面等离子共振增强技术制备新型高性能可见——近红外光电探测器,具体内容如下：1.拓扑绝缘体是一类内部绝缘,表面呈现金属特性的材料,该材料表面对旋光有响应,基于以上特性考虑用拓扑绝缘体碲化锑制备光电探测器。本文是采用分子束外延的方法制备拓扑绝缘体碲化锑薄膜,并利用ARPES, XRD等方法表征碲化锑薄膜,发现所制备的碲化锑薄膜单晶性能良好。采用微电子加工工艺制备基于该材料的近红外光电探测器。通过半导体测试系统的电学表征发现,利用该扑绝缘体制备的近红外光电探测器具有很高的光电导增益、光响应,分别达到27.4,21.7AW-1。2.表面等离子共振技术是采用金属纳米颗粒或者是氧化物纳米颗粒修饰器件的表面,当尺寸满足一定条件的时候,可以增强器件对光的吸收,从而提高器件的性能。本文首先采用化学气相沉积法制备碲化锌纳米线,并用水热法将一部分纳米线修饰金纳米颗粒,将修饰前后的碲化锌纳米线制备成光电导型的绿光探测器。通过光电表征分析发现,修饰前后碲化锌纳米制备而成的光电探测器的性能得到提升,光电流增加了7倍。此外,基于有限元分析法的理论模拟证明表面等离子共振对器件性能具有增强的作用,这与实验相结果相符合。本文通过以上两点,证明了拓扑绝缘体在光电探测领域有巨大潜力,同时也证明表面等离子修饰对器件性能提高具有一定的作用。
[Abstract]:When humans opened their eyes for the first time, the natural photodetector "eyes" began to work. The first photodetector in the real sense was made after the photoelectric effect was proposed. The growing market demand has led to the rapid development of photodetectors, such as the strong demand in the military equipment market, which has led to rapid growth in the research and production of infrared detectors. With the rapid development of microelectronic technology and new materials, the detection range of photodetectors from ultraviolet to infrared region has a lot of related research and application. However, in order to achieve better performance and wider detection range, researchers focus on improving device performance. This paper focuses on how to fabricate a novel high performance visible near infrared photodetector using topological insulator materials and surface plasmon resonance enhancement technology. The main contents are as follows: 1. Topological insulator is a kind of materials with internal insulation and metal characteristics. The surface of the material is responsive to optical rotation. Based on the above characteristics, antimony telluride as a topological insulator is considered to be used to prepare photodetectors. The antimony telluride thin film was prepared by molecular beam epitaxy (MBE). The antimony telluride thin film was characterized by ARPES, XRD and other methods. It was found that the single crystal properties of the antimony telluride thin film were good. The near infrared photodetector based on the material is fabricated by microelectronic processing technology. Through the electrical characterization of the semiconductor test system, it is found that the near infrared photodetector prepared by this system has very high photoconductive gain and light response of 27.4 and 21.7AW / 1.2, respectively. Surface plasmon resonance (SPR) technique uses metal nanoparticles or oxide nanoparticles to modify the surface of the device. When the size of the device meets certain conditions, the absorption of light can be enhanced and the performance of the device can be improved. In this paper, zinc telluride nanowires were prepared by chemical vapor deposition, and some gold nanoparticles were modified by hydrothermal method, and zinc telluride nanowires before and after modification were prepared as photoconductive green photodetectors. It was found that the performance of the photodetector prepared by zinc telluride nano-meter before and after modification was improved and the photocurrent was increased by 7 times. In addition, the theoretical simulation based on finite element analysis shows that surface plasmon resonance can enhance the performance of the device, which is in agreement with the experimental results. In this paper, it is proved that the topological insulator has great potential in the field of photoelectric detection, and that the surface plasma modification can improve the performance of the device to a certain extent.
【学位授予单位】：合肥工业大学
【学位级别】：硕士
【学位授予年份】：2016
【分类号】：TN215
，
本文编号：2467631
[Abstract]:When humans opened their eyes for the first time, the natural photodetector "eyes" began to work. The first photodetector in the real sense was made after the photoelectric effect was proposed. The growing market demand has led to the rapid development of photodetectors, such as the strong demand in the military equipment market, which has led to rapid growth in the research and production of infrared detectors. With the rapid development of microelectronic technology and new materials, the detection range of photodetectors from ultraviolet to infrared region has a lot of related research and application. However, in order to achieve better performance and wider detection range, researchers focus on improving device performance. This paper focuses on how to fabricate a novel high performance visible near infrared photodetector using topological insulator materials and surface plasmon resonance enhancement technology. The main contents are as follows: 1. Topological insulator is a kind of materials with internal insulation and metal characteristics. The surface of the material is responsive to optical rotation. Based on the above characteristics, antimony telluride as a topological insulator is considered to be used to prepare photodetectors. The antimony telluride thin film was prepared by molecular beam epitaxy (MBE). The antimony telluride thin film was characterized by ARPES, XRD and other methods. It was found that the single crystal properties of the antimony telluride thin film were good. The near infrared photodetector based on the material is fabricated by microelectronic processing technology. Through the electrical characterization of the semiconductor test system, it is found that the near infrared photodetector prepared by this system has very high photoconductive gain and light response of 27.4 and 21.7AW / 1.2, respectively. Surface plasmon resonance (SPR) technique uses metal nanoparticles or oxide nanoparticles to modify the surface of the device. When the size of the device meets certain conditions, the absorption of light can be enhanced and the performance of the device can be improved. In this paper, zinc telluride nanowires were prepared by chemical vapor deposition, and some gold nanoparticles were modified by hydrothermal method, and zinc telluride nanowires before and after modification were prepared as photoconductive green photodetectors. It was found that the performance of the photodetector prepared by zinc telluride nano-meter before and after modification was improved and the photocurrent was increased by 7 times. In addition, the theoretical simulation based on finite element analysis shows that surface plasmon resonance can enhance the performance of the device, which is in agreement with the experimental results. In this paper, it is proved that the topological insulator has great potential in the field of photoelectric detection, and that the surface plasma modification can improve the performance of the device to a certain extent.
【学位授予单位】：合肥工业大学
【学位级别】：硕士
【学位授予年份】：2016
【分类号】：TN215
，
本文编号：2467631
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