多功能键合仪研制及在教学中的应用
发布时间：2019-05-14 16:33
【摘要】：对硅/玻璃阳极键合进行了实验技术研究,阐述了实验设计思路;确定了实验的内容和方法,据此研制出能直观显示硅/玻璃界面键合情况以及键合电流-时间曲线的多功能键合实验仪。通过键合操作、现象观察和深入分析,使学生更加深入了解键合机理、掌握影响键合效果与效率的主要因素。该实验技术有助于提升学生的动手能力、分析能力以及综合素质。
[Abstract]:The experimental technology of silicon / glass anode bonding is studied, and the experimental design idea is expounded. The contents and methods of the experiment are determined, and a multifunctional bonding experimental instrument is developed, which can intuitively display the bonding of silicon / glass interface and the bonding current-time curve. Through bonding operation, phenomenon observation and in-depth analysis, the students can understand the bonding mechanism more deeply and master the main factors that affect the bonding effect and efficiency. This experimental technique is helpful to improve students' practical ability, analytical ability and comprehensive quality.
【作者单位】： 哈尔滨工业大学航天学院;
【基金】：黑龙江省自然科学基金项目(E200917) 哈尔滨工业大学教学实验室建设项目
【分类号】：TN405
本文编号：2476866
[Abstract]:The experimental technology of silicon / glass anode bonding is studied, and the experimental design idea is expounded. The contents and methods of the experiment are determined, and a multifunctional bonding experimental instrument is developed, which can intuitively display the bonding of silicon / glass interface and the bonding current-time curve. Through bonding operation, phenomenon observation and in-depth analysis, the students can understand the bonding mechanism more deeply and master the main factors that affect the bonding effect and efficiency. This experimental technique is helpful to improve students' practical ability, analytical ability and comprehensive quality.
【作者单位】： 哈尔滨工业大学航天学院;
【基金】：黑龙江省自然科学基金项目(E200917) 哈尔滨工业大学教学实验室建设项目
【分类号】：TN405
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，本文编号：2476866
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