压电驱动菱形放大式胶体微喷系统的建模与实验
发布时间：2019-05-24 12:42
【摘要】：为实现微电子封装领域各类胶体的精确微量分配,设计了基于菱形放大机构放大压电致动器位移的微喷系统,利用集总参数法建立了该系统的等效电器模型,通过实验验证了模型和仿真结果的可靠性,分析了系统参数对胶滴体积和脱离效果的影响.实验和仿真表明:撞针位移在0.3~0.5mm时为有利于喷射胶滴的范围内;针对3Pa·s黏度的胶体,当驱动气压在0.15~0.32MPa时,喷射体积与驱动气压成正相关趋势;随着黏度的增大,相同条件下可获取的胶滴体积不断减小,需要的驱动力不断增大;对于特定黏度的胶体,在合适气压范围内,调控分配频率可实现对微喷体积的调节.
[Abstract]:In order to realize the accurate micro distribution of all kinds of colloids in the field of microelectronic packaging, a micro spray system based on rhomboid amplification mechanism to amplify the displacement of piezoelectric actuator is designed, and the equivalent electrical model of the system is established by lumped parameter method. The reliability of the model and simulation results is verified by experiments, and the influence of system parameters on droplet volume and detachment effect is analyzed. The experimental and simulation results show that the displacement of the impingement needle is in the range of spray droplets at 0.3~0.5mm, and for the colloid with 3Pa 路s viscosity, when the driving pressure is 0.15~0.32MPa, the injection volume is positively correlated with the driving pressure. With the increase of viscosity, the volume of droplets available under the same conditions decreases and the driving force is increasing. For colloids with specific viscosity, the distribution frequency can be adjusted by adjusting the distribution frequency in the appropriate pressure range.
【作者单位】： 山东大学(威海)机电与信息工程学院;哈尔滨工业大学机器人技术与系统国家重点实验室;
【基金】：国家自然科学基金资助项目(51605261) 博士后科学基金资助项目(2016M592179) 山东省科技发展计划项目(2016GGX103004)
【分类号】：TN405
本文编号：2484866
[Abstract]:In order to realize the accurate micro distribution of all kinds of colloids in the field of microelectronic packaging, a micro spray system based on rhomboid amplification mechanism to amplify the displacement of piezoelectric actuator is designed, and the equivalent electrical model of the system is established by lumped parameter method. The reliability of the model and simulation results is verified by experiments, and the influence of system parameters on droplet volume and detachment effect is analyzed. The experimental and simulation results show that the displacement of the impingement needle is in the range of spray droplets at 0.3~0.5mm, and for the colloid with 3Pa 路s viscosity, when the driving pressure is 0.15~0.32MPa, the injection volume is positively correlated with the driving pressure. With the increase of viscosity, the volume of droplets available under the same conditions decreases and the driving force is increasing. For colloids with specific viscosity, the distribution frequency can be adjusted by adjusting the distribution frequency in the appropriate pressure range.
【作者单位】： 山东大学(威海)机电与信息工程学院;哈尔滨工业大学机器人技术与系统国家重点实验室;
【基金】：国家自然科学基金资助项目(51605261) 博士后科学基金资助项目(2016M592179) 山东省科技发展计划项目(2016GGX103004)
【分类号】：TN405
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