激光差动共焦干涉元件参数测量关键技术

发布时间：2019-06-17 17:51

【摘要】：随着如激光核聚变系统和紫外光刻机等国防、前沿科研技术领域的发展,对于球面元件参数的测量精度也随之提高。另外,光学元件的高精密加工是以高精度的检测为支撑的,检测精度在很大意义上决定了元件的加工精度。因而,与之相关的球面元件参数的高精度测量技术及其仪器化研究,具有重要的理论研究意义。针对球面元件参数的高精度检测难题,本论文研究并建立了激光差动共焦干涉元件参数测量系统。该系统把激光差动共焦理论与移相干涉理论进行有机融合,设计并搭建了激光差动共焦元件参数综合测量光路,其利用激光差动共焦原理实现对球面元件猫眼与共焦位置的精确定位从而实现球面元件曲率半径的高精度测量;同时,利用五步移相干涉测量技术实现对球面元件面形的高精度检测,进而实现球面元件曲率半径和面型的高精度同时测量。本论文主要研究内容为:1)分析激光差动共焦曲率半径测量原理与移相干涉面形测量原理,并将二者有机融合,构建激光差动共焦干涉元件参数测量光路。2)优化激光差动共焦干涉元件参数测量系统光路:在光学设计仿真软件Zemax中构建了系统仿真模型,根据系统要求,对系统所用的准直镜实现仿真设计,分析系统中两模块在光路中的相互影响。3)完成系统的机械结构设计:利用Solidworks软件对系统结构中用到的机械结构件进行设计,完成系统的搭建。4)实验验证及误差分析:验证所研制测量系统的有效性及其技术性能,并依据实验,分析干涉测量模块与曲率半径测量模块之间的相互影响。
[Abstract]:With the development of national defense, such as laser fusion system and ultraviolet lithography machine, the measurement accuracy of spherical element parameters is also improved with the development of frontier scientific research and technology. In addition, the high precision machining of optical elements is supported by high precision detection, and the detection accuracy determines the machining accuracy of the elements in a great sense. Therefore, it is of great theoretical significance to study the high precision measurement technology and instrumentalization of spherical element parameters. In order to solve the problem of high precision detection of spherical element parameters, a laser differential confocal interferometric element parameter measurement system is studied and established in this paper. The system combines the laser differential confocal theory with the phase-shifting interference theory organically, and designs and builds a comprehensive optical path for measuring the parameters of the laser differential confocal element. The laser differential confocal principle is used to realize the accurate positioning of the cat's eye and confocal position of the spherical element so as to realize the high precision measurement of the curvature radius of the spherical element. At the same time, the five-step phase-shifting interferometric technique is used to realize the high precision detection of the surface shape of the spherical element, and then the high precision simultaneous measurement of the curvature radius and the surface shape of the spherical element is realized. The main research contents of this paper are as follows: 1) the measuring principle of laser differential confocal curvature radius and the principle of phase-shifting interferometric surface shape measurement are analyzed, and the optical path of laser differential confocal interferometric element parameter measurement system is constructed by combining the two organically. 2) optimizing the optical path of laser differential confocal interferometric element parameter measurement system: according to the system requirements, the system simulation model is constructed in the optical design simulation software Zemax. The simulation design of the collimator used in the system is realized, and the interaction between the two modules in the optical path is analyzed. 3) complete the mechanical structure design of the system: using Solidworks software to design the mechanical structure parts used in the system structure, complete the construction of the system. 4) Experimental verification and error analysis: verify the effectiveness and technical performance of the measurement system, and according to the experiment, The interaction between interferometric module and curvature radius measurement module is analyzed.
【学位授予单位】：北京理工大学
【学位级别】：硕士
【学位授予年份】：2016
【分类号】：TN249

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