基于SOI的光学微环谐振腔设计及性能研究
发布时间：2019-06-19 15:08
【摘要】：针对目前集成电路和光学器件向微型化、集成化的发展趋势，以及构建大规模光电一体化集成系统的现实需求，基于SOI（Silicon On Insulator）的微环谐振腔由于其高集成度、与CMOS工艺兼容等优点，迅速成为了热点研究课题，并在高灵敏度传感器、全光网络、光陀螺、光开关等领域显示出了巨大的应用潜力。 本文结合国内外的微环谐振腔的研究现状，采用理论推导分析与模拟仿真验证相结合的方法，研究设计并加工测试了多种基于SOI的微环谐振腔结构，旨在通过微环谐振腔的结构优化，提高谐振腔的Q值。 首先，本文研究了基于回音壁谐振模（WGM）的微环谐振腔的理论，，采用耦合模理论和光的干涉理论，对多种单微环和双微环谐振腔结构进行了理论推导和传输特性分析。详细讨论了串联双微环结构（2R1B）的谐振分离特性与两环周长比的关系和并联双微环结构（2R2B）的耦合诱导透明效应（CRIT）的产生条件。 然后，建立了基于有限时域差分算法（FDTD）的多种微环谐振腔的模拟仿真模型，分别对单微环耦合双波导结构（1R2B）和并联双微环结构（2R2B）的参数进行了仿真分析和优化，并分析了其生物传感性能。仿真结果表明，基于CRIT效应的2R2B结构其生物传感灵敏度达到了223.3nm/RIU，约是单微环的3倍。 最后，本文总结了仿真的微环谐振腔结构参数，并结合微加工工艺对其进行了版图设计和加工测试，为下一步的实验研究奠定了基础。
[Abstract]:In view of the development trend of miniaturization and integration of integrated circuits and optical devices, as well as the practical demand of constructing large-scale optoelectronic integrated system, the microloop resonator based on SOI (Silicon On Insulator) has rapidly become a hot research topic because of its high integration and compatibility with CMOS process, and has shown great application potential in the fields of high sensitivity sensors, all-optical networks, optical gyroscopes, optical switches and so on. In this paper, according to the research status of microring resonator at home and abroad, the structure of microring resonator based on SOI is designed and tested by using the method of theoretical derivation analysis and simulation verification. The purpose of this paper is to improve the Q value of microring resonator by optimizing the structure of microring resonator. Firstly, the theory of microring resonator based on echo wall resonance mode (WGM) is studied in this paper. by using coupled mode theory and light interference theory, the theoretical derivation and transmission characteristics of various single and double microring resonator structures are carried out. The relationship between the resonant separation characteristics of series double microring structure (2R1B) and the perimeter ratio of two rings is discussed in detail, and the conditions for the generation of transparency effect (CRIT) induced by the coupling of parallel double microring structure (2R2B) are discussed in detail. Then, the simulation models of various microring resonators based on finite time domain difference (FDTD) algorithm are established. The parameters of single microloop coupled double waveguide structure (1R2B) and parallel double microloop structure (2R2B) are simulated and optimized, and their biosensor performance is analyzed. The simulation results show that the biosensor sensitivity of 2R2B structure based on CRIT effect is 223.3 nm 鈮
本文编号：2502434
[Abstract]:In view of the development trend of miniaturization and integration of integrated circuits and optical devices, as well as the practical demand of constructing large-scale optoelectronic integrated system, the microloop resonator based on SOI (Silicon On Insulator) has rapidly become a hot research topic because of its high integration and compatibility with CMOS process, and has shown great application potential in the fields of high sensitivity sensors, all-optical networks, optical gyroscopes, optical switches and so on. In this paper, according to the research status of microring resonator at home and abroad, the structure of microring resonator based on SOI is designed and tested by using the method of theoretical derivation analysis and simulation verification. The purpose of this paper is to improve the Q value of microring resonator by optimizing the structure of microring resonator. Firstly, the theory of microring resonator based on echo wall resonance mode (WGM) is studied in this paper. by using coupled mode theory and light interference theory, the theoretical derivation and transmission characteristics of various single and double microring resonator structures are carried out. The relationship between the resonant separation characteristics of series double microring structure (2R1B) and the perimeter ratio of two rings is discussed in detail, and the conditions for the generation of transparency effect (CRIT) induced by the coupling of parallel double microring structure (2R2B) are discussed in detail. Then, the simulation models of various microring resonators based on finite time domain difference (FDTD) algorithm are established. The parameters of single microloop coupled double waveguide structure (1R2B) and parallel double microloop structure (2R2B) are simulated and optimized, and their biosensor performance is analyzed. The simulation results show that the biosensor sensitivity of 2R2B structure based on CRIT effect is 223.3 nm 鈮
本文编号：2502434
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