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蓝宝石选择性刻蚀技术的研究

发布时间:2018-02-25 15:23

  本文关键词: 蓝宝石 飞秒激光 超声刻蚀 表面形貌 出处:《吉林大学》2017年硕士论文 论文类型:学位论文


【摘要】:蓝宝石硬度高,化学稳定性好且熔点高,同时具有很好的透光性,是光学元件、光罩和飞行器窗口的重要材料。蓝宝石的脆性大、化学性质稳定,很难利用传统方法加工。选择性激光刻蚀技术是包括飞秒激光扫描和化学腐蚀的复合加工方法,本文通过优化飞秒激光加工参数以获得较好的表面形貌,利用二维超声振动辅助化学腐蚀提高加工效率和表面质量。并研究射流技术结合化学腐蚀对提高蓝宝石加工区域表面质量的改善作用。本文主要工作如下:优化激光加工参数:准确计算蓝宝石的激光烧灼阈值,为2.0296J/cm2。根据焦点的投影面积,推导出在蓝宝石表面激光扫描速度与脉冲数的关系通式;提出交叉式逐行的扫描路径,并仿真表面形貌,得出当扫描行间距一定,焦点长轴平行于被加工表面时,焦点纵横比越大,残留高度越大,长轴垂直被加工表面时结论相反;焦点尺寸越小,残留高度越大。当焦点尺寸确定,扫描行间距越大,残留高度越大,且二者关系曲线形状与焦点弧形轮廓一致。激光加工试验表明,超过阈值情况下,激光功率越小激光热影响区越小(烧蚀孔的直径越小);脉冲数多少对烧蚀孔直径大小影响很小。研制二维超声振动装置辅助化学刻蚀,分别选用HF以及浓H2SO4对激光加工后的蓝宝石试件进行超声刻蚀实验。HF刻蚀蓝宝石正交实验表明40%浓度、刻蚀1h的条件下蓝宝石表面质量较好,能够降低0.5382μm,相比非超声振动刻蚀去除率提高约81%,并能够减少约69%的腐蚀层生成。此外,浓H2SO4溶液刻蚀实验证实温度越高刻蚀效果越好,但远不如HF溶液的刻蚀效果。结合射流技术与化学腐蚀技术,分别进行了酸射流刻蚀实验和磨料刻蚀实验,分析了流速对刻蚀效果的影响,同时验证了磨料与刻蚀液混合进行抛光的可行性。结果表明,表面材料去除量随酸射流流速的增加而增大,趋势逐渐变大。磨料酸射流实验中,发现抛光液与刻蚀液混合后立即加工的材料去除效果比酸射流好,效果与磨料水射流抛光相差不多,说明磨料刻蚀射流中抛光起主要作用,抛光液与腐蚀液混合时间越长,效果越差。
[Abstract]:Sapphire has high hardness, good chemical stability and high melting point. It is an important material for optical elements, light masks and aircraft windows. Selective laser etching is a compound processing method including femtosecond laser scanning and chemical etching. In this paper, the parameters of femtosecond laser processing are optimized to obtain better surface morphology. Two dimensional ultrasonic vibration assisted chemical etching is used to improve machining efficiency and surface quality. The effect of jet technique combined with chemical corrosion on the improvement of surface quality in sapphire processing area is studied. The main work of this paper is as follows:. Laser processing parameters: accurate calculation of laser cauterization threshold of sapphire, The relationship between laser scanning speed and pulse number on the sapphire surface is derived according to the projected area of focus, and the cross scanning path is proposed, and the surface morphology is simulated, which shows that the scanning line spacing is constant. When the focus axis is parallel to the machined surface, the larger the focus aspect ratio is, the greater the residual height is, and the opposite conclusion is obtained when the long axis is processed vertically; the smaller the focal point size, the greater the residual height. The higher the residual height is, and the shape of the relationship curve is the same as the focus arc profile. The laser processing test shows that when the threshold is exceeded, the shape of the curve is the same as that of the focus arc. The smaller the laser power is, the smaller the heat affected zone is (the smaller the diameter of the ablation hole is; the smaller the number of pulses is, the smaller the diameter of the ablation hole is.) the development of a two-dimensional ultrasonic vibration device to assist chemical etching, The ultrasonic etching experiments of laser processed sapphire samples with HF and concentrated H _ 2SO _ 4 showed that the surface quality of sapphire was better when the concentration of 40% was 40% and the etching time was 1 h. It can reduce 0.5382 渭 m, increase the removal rate of non-ultrasonic vibration etching by about 81%, and reduce the formation of corrosion layer by about 69%. In addition, the etching experiment of concentrated H _ 2SO _ 4 solution proves that the higher the temperature, the better the etching effect is. However, the etching effect of HF solution is not as good as that of HF solution. Combined with jet technique and chemical etching technique, the experiments of acid jet etching and abrasive etching are carried out, and the effect of flow rate on etching effect is analyzed. At the same time, the feasibility of polishing with abrasive and etching solution is verified. The results show that the removal amount of surface material increases with the increase of the velocity of acid jet, and the trend becomes larger. It is found that the material removal effect of polishing liquid and etching liquid immediately after mixing is better than that of acid jet, and the effect is not much different from that of abrasive water jet polishing, which indicates that polishing plays a major role in abrasive etching jet, and the longer the mixing time of polishing liquid and corrosion liquid is, The worse the effect.
【学位授予单位】:吉林大学
【学位级别】:硕士
【学位授予年份】:2017
【分类号】:TQ164

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