基于光诱导电动力学的微纳器件一体化制造方法

发布时间：2018-03-04 21:21

本文选题：光诱导介电泳　切入点：光诱导电化学反应　出处：《沈阳理工大学》2017年硕士论文　论文类型：学位论文

【摘要】：微纳米技术是未来科技发展的关键组成部分,使加工产物向小型化和智能化方向发展。传统微纳米加工技术所需要的加工设备价格昂贵,加工条件要求较高,极大制约了微纳米加工技术的大范围应用。光诱导微纳加工技术,基于介电泳原理,可以实现对微纳米颗粒,如二氧化硅颗粒,碳纳米管、生物细胞的移动和分离,也可完成金属离子的电化学沉积,实现微纳米金属的加工制造。微纳米柔性器件可以应用于很多生物测试中,目前的加工方法主要局限于打印和光刻方法,加工成本和最小加工精度受到很大限制。本论文以光诱导微纳加工为研究对象,对金属微电极的加工参数进行探究,并进行理论分析,对优化后参数产生的金属微电极转印到柔性基底,实现了基于光诱导微纳加工的柔性器件的制造。论文的主要研究内容包括:(1)基于光诱导介电泳汇聚和动态移动二氧化硅颗粒和PEGDA模块。基于光诱导在空间中对微纳米颗粒的介电泳作用和实验与仿真得到的操作参数,在光诱导介电泳平台上通过介电泳力移动并操作PEGDA模块,实现模块的拼接、排列和旋转等操作。(2)研究光诱导电化学反应原理。对光诱导电化学反应机理通过数学公式分析证明,并使用有限元分析软件对光诱导电化学在空间中进行仿真分析,得到相应的反应机理及参数要求。(3)对基于光诱导电化学沉积的金属微电极的加工参数进行分析。通过对影响光诱导电化学沉积金属微电极的加工参数(输入交流电信号频率、幅值,金属盐溶液浓度和氢化非晶硅厚度)研究,使加工出的金属微电极的形状可控,并且对表面粗糙度和沉积高度进行表征,得到相应参数可加工出符合要求的金属微电极。(4)采用转印方法将光诱导电化学沉积的金属微电极转移到柔性基底上。研究可行方案将光诱导电化学沉积的金属微电极转印到柔性材料上,并且保证转印后的微金属电极形状完整,导电性能良好。(5)优化转印方法研究不同转印参数对转移影响。对不同转印方式和转印基底参数实验分析,得到理论转印成功概率,并通过实验结果优化转印方法,得到一种高效的,完整的转印微电极方式。通过使用光诱导电化学沉积可以在常温、常压下,快速沉积出图形化的金属微电极,相较于其他微纳加工方法具有很大优势,控制外部参数实现了控制沉积电极的形状、高度和精细程度,将微金属电极转印到柔性材料上,拓展了光诱导电化学沉积电极的应用范围,为此方法下实现柔性传感器器件打下良好的基础。
[Abstract]:Micronanotechnology is a key component of the development of science and technology in the future, which makes the processing products develop towards miniaturization and intelligentization. The processing equipment required by the traditional micro-nano processing technology is expensive and the processing conditions are high. Light induced micro-nano processing technology, based on the principle of dielectric electrophoresis, can realize the movement and separation of microparticles, such as silica particles, carbon nanotubes, biological cells, and so on. The electrochemical deposition of metal ions can also be accomplished, and the fabrication of micro and nano metals can be realized. Micro and nano flexible devices can be used in many biological tests, and the current processing methods are mainly confined to printing and lithography. The processing cost and minimum machining precision are greatly limited. In this paper, the processing parameters of metal microelectrode are investigated and analyzed theoretically. The metal microelectrode produced by the optimized parameters is transferred to the flexible substrate. The fabrication of flexible devices based on photoinduced micro / nano machining is realized. The main research contents in this paper include: 1) on the basis of photoluminescence aggregation and dynamic movement of silica particles and PEGDA modules. The dielectric and electrophoretic effects of nanoparticles and the operating parameters obtained from experiments and simulations, The principle of photoinduced electrochemical reaction was studied on the platform of photoinduced electrophoretic by moving and manipulating PEGDA module by means of medium electrophoretic force. The mechanism of photoinduced electrochemical reaction was proved by mathematical formula analysis, such as splicing, arrangement and rotation of the module, and the mechanism of photoinduced electrochemical reaction was proved by mathematical formula analysis. The finite element analysis software is used to simulate the photoinduced electrochemistry in space. The processing parameters of metal microelectrode based on photoinduced electrochemical deposition were analyzed by obtaining the corresponding reaction mechanism and parameter requirements. The study of amplitude, concentration of metal salt solution and thickness of hydrogenated amorphous silicon makes the shape of the fabricated metal microelectrode controllable, and the surface roughness and deposition height are characterized. The corresponding parameters can be obtained to process the metal microelectrode which meets the requirements.) the metal microelectrode deposited by photoinduced electrochemical deposition is transferred to the flexible substrate by transfer printing method. The feasible scheme is to study the metal microelectrode deposited by photoinduced electrochemical deposition. The electrodes are transferred to the flexible material, And the shape of the micrometal electrode after the transfer is complete and the electrical conductivity is good. 5) optimize the transfer method to study the effect of different transfer parameters on the transfer. Through the experimental analysis of different transfer modes and transfer substrate parameters, the successful probability of theoretical transfer printing is obtained. By optimizing the method of transfer printing, an efficient and complete transfer microelectrode method is obtained. By using photoinduced electrochemical deposition, a graphical metal microelectrode can be rapidly deposited at room temperature and atmospheric pressure. Compared with other micro-nano machining methods, it has a great advantage. The shape, height and fineness of the deposited electrode are controlled by controlling the external parameters, and the micro-metal electrode is transferred to the flexible material. The application range of photoinduced electrochemical deposition electrode is expanded, and a good foundation is laid for the realization of flexible sensor device by this method.
【学位授予单位】：沈阳理工大学
【学位级别】：硕士
【学位授予年份】：2017
【分类号】：TQ150

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