室温合成非晶CdO纳米片阵列及其气敏性能研究
发布时间:2018-03-06 04:14
本文选题:气敏 切入点:室温制备 出处:《天津大学》2016年硕士论文 论文类型:学位论文
【摘要】:随着现代社会工业化的高速发展,生活中可以接触到的危险气体逐渐增多,这些气体一旦外泄,会对人们的生命财产安全带来不可估量的损失。因此,研发性能优异的气敏传感器以实现对危险气体快速准确的监控是十分有必要的。本文通过室温化学浴沉积法在FTO和叉指电极表面一步法制备了非晶结构的CdO纳米片阵列,通过SEM、XPS、EELS、FTIR等表征方法和气敏性能的测试,探讨了非晶CdO纳米片阵列作为气敏材料在探测乙醚气体上的独特优势。之后探索了合适的热处理方式,制备了高比表面积的多晶CdO纳米片阵列,探讨了三维CdO结构的优势。主要取得以下结果:本文成功地用室温化学浴沉积的方法原位制备了非晶CdO纳米片阵列,该方法成本低过程简便,室温制备有利于扩大基底的选择范围,原位生长使基底和材料接触更牢固。非晶材料表面大量的缺陷会成为吸附O2的活性位点,当器件与目标气体接触时,会有充足的氧离子与其反应,提高了器件的灵敏度,使得本身电阻很高的材料对于乙醚有了稳定的响应。室温制备使得材料表面附着大量的含氧官能团,由于分子间作用力会对乙醚产生选择性吸附,提高了材料对于乙醚的选择性。另外,由于片阵列结构,有利于气体在材料内部的扩散,大大提高了器件对于乙醚的响应时间,对50ppm的乙醚的响应时间为4.5s,为目前报道过的最短响应时间。将非晶CdO材料先选用CdCl_2的饱和甲醇溶液浸泡,之后在空气中350℃退火1小时,得到了很好的保持了阵列形貌的结晶性CdO材料。器件对于200ppm异丙醇的灵敏度达到了90,而对于乙醇为35。
[Abstract]:With the rapid development of industrialization in modern society, the number of dangerous gases in daily life is increasing gradually. Once these gases are released out, they will bring incalculable losses to the safety of people's lives and property. It is necessary to develop a gas sensor with excellent performance for the rapid and accurate monitoring of dangerous gases. In this paper, amorphous CdO nanoarrays were fabricated on the surface of FTO and interDigital electrodes by room temperature chemical bath deposition. The unique advantage of amorphous CdO nanoscale array as gas sensing material in detecting ether gas was discussed by means of the characterization method and gas sensing performance test of SEM-XPSX EELSX FTIR, and the suitable heat treatment method was explored. Polycrystalline CdO nanoarrays with high specific surface area were prepared, and the advantages of three-dimensional CdO structures were discussed. The main results were as follows: amorphous CdO nanoarrays were successfully prepared in situ by chemical bath deposition at room temperature. This method has the advantages of low cost and simple process, the preparation at room temperature is beneficial to expand the selective range of substrate, and in situ growth makes the contact between substrate and material stronger. A large number of defects on the surface of amorphous materials will become the active sites for the adsorption of O2. When the device is in contact with the target gas, there will be sufficient oxygen ions to react with it, which improves the sensitivity of the device. The materials with high resistance have a stable response to ether. The preparation at room temperature results in a large number of oxygen-containing functional groups attached to the surface of the material, which is selectively adsorbed by the intermolecular force on the ether. The selectivity of the material to ether is improved. In addition, because of the structure of the chip array, it is advantageous to the diffusion of gas inside the material and greatly increases the response time of the device to the ether. The response time for 50 ppm ether is 4.5 s, which is the shortest reported response time. The amorphous CdO material is first soaked in saturated methanol solution of CdCl_2, then annealed in air at 350 鈩,
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