SiBAlON陶瓷前驱体的制备与裂解

发布时间：2018-03-16 02:09

  本文选题：前驱体　切入点：裂解　出处：《宇航材料工艺》2016年03期 　论文类型：期刊论文

【摘要】：以聚铝氧烷为铝源,聚硼硅氮烷兼作硼源和硅源,共混得到SiBAlON陶瓷前驱体,经高温裂解得到SiBAlON陶瓷。采用TGA和XRD对SiBAlON前驱体的裂解行为及陶瓷产物晶相结构进行表征。结果表明,Al的引入降低了陶瓷的结晶温度,当陶瓷中的Al含量为10wt%时,1 300℃处理后析出β-Si_3N_4晶体,1 500℃时,陶瓷中的Al和O与无定型的Si-N结合生成出现Si_2N_2O和Si_3Al_3O_(3+1.5x)N_(5-x)结晶,1 700℃时Al和O与结晶的β-Si_3N_4固溶生成β’-SiAlON结晶,最终陶瓷产物晶相组成为Si_2N_2O/Si_3Al_3O_(3+1.5x)N_(5-x)/β’-SiAlON。对陶瓷的介电性能进行研究表明,温度1 000℃时,其介电常数和介电损耗较为稳定,分别约为3和0.004。
[Abstract]:The SiBAlON ceramic precursor was prepared by using polyaluminoxane as aluminum source and polyborosilane as boron and silicon source. SiBAlON ceramics were obtained by pyrolysis at high temperature. The pyrolysis behavior of SiBAlON precursors and the crystal structure of the ceramic products were characterized by TGA and XRD. The results showed that the introduction of Al reduced the crystallization temperature of the ceramics. When Al content in ceramics was 10 wt%, after treatment at 1 300 鈩，

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