基于CVD法制备单层石墨烯工艺参数的优化

发布时间：2018-03-17 06:09

  本文选题：石墨烯　切入点：化学气相沉积法　出处：《哈尔滨理工大学》2016年硕士论文　论文类型：学位论文

【摘要】：石墨烯(Graphene)拥有独特的晶体结构,使其具备优异的物理和化学性能,在微纳器件和超材料领域中有广阔的应用前景。材料性能直接关系到材料的应用,发挥石墨烯的优异性能,关键在于如何制备拥有性能优良的单层石墨烯。本文基于化学气相沉积法(CVD)开展课题研究工作,探究了石墨烯的生长过程中,各关键生长参数对石墨烯质量的影响,测试了石墨烯的透光率和导电性能;并将生长的石墨烯通过图案化处理制备出简单的电容器构型,探索了石墨烯在功能器件方面应用可行性。本文首先研究了以铜箔为基底的单层石墨烯制备工艺,探究了反应温度,碳源浓度,反应时间等参数对石墨烯生长的影响;优化反应参数,制备出了表面均一的单层石墨烯薄膜,通过测试,所得石墨烯具有较高的透光率(92.7%-95.3%)和较低的方阻(152.2-326.3Ω/sq),保证了石墨烯的在透光和导电方面的综合性能。研究了低压条件下,以甲烷为碳源,石墨烯在铜箔上的生长规律,结果发现:随着温度的增加,石墨烯的表面质量也随之变高,但是高于1000℃的时候,效果趋于稳定;当甲烷浓度大于35sccm时,石墨烯成膜,但是出现多层区域,随着石墨烯浓度的降低,薄膜的质量和均匀性也随之提高,然而当浓度达到5sccm时,石墨烯并未成膜;在2min-30min内,随着生长时间的增加,石墨烯表面均一性随之提高。根据以上结论,得出试用于我们设备的优化参数为:生长温度1000℃,甲烷流量35sccm,氢气流量10sccm。此外,基于光刻技术图案化制备了石墨烯平面电容器结构,从而为石墨烯超材料的制备提供了实验基础。
[Abstract]:Graphene (Graphene) has a unique crystal structure, which makes it have excellent physical and chemical properties, and has a broad application prospect in the field of micro and nano devices and supermaterials. The properties of materials are directly related to the application of materials and play an important role in the excellent properties of graphene. The key point is how to prepare graphene monolayer with excellent properties. In this paper, the effect of key growth parameters on the quality of graphene was studied based on the chemical vapor deposition (CVD) method. The transmittance and conductivity of graphene were tested, and a simple capacitor configuration was prepared by patterning the graphene. The feasibility of graphene application in functional devices was explored. Firstly, the preparation process of graphene monolayer based on copper foil was studied, and the effects of reaction temperature, concentration of carbon source and reaction time on the growth of graphene were investigated. Single layer graphene thin films with uniform surface were prepared by optimizing reaction parameters. The obtained graphene has a high transmittance of 92.7- 95.3) and a lower square resistance of 152.2-326.3 惟 / sqng, which ensures the comprehensive properties of graphene in light transmission and conductivity. The growth law of graphene on copper foil with methane as carbon source at low pressure is studied. The results show that with the increase of temperature, the surface quality of graphene becomes higher, but when the temperature is higher than 1000 鈩，

本文编号：1623477