晶硅炉热场用碳材料在硅蒸汽中的腐蚀行为研究

发布时间：2018-03-19 21:23

本文选题：碳材料　切入点：硅化　出处：《无机材料学报》2017年07期 　论文类型：期刊论文

【摘要】：对晶硅炉热场用三种碳材料(石墨、C/C复合材料、硬质碳毡)在不同腐蚀条件下进行了硅蒸汽腐蚀实验,研究了不同碳材料的硅化腐蚀行为。结果表明:三种材料的结构组成不同,导致三种碳材料在高温环境下与硅蒸汽发生硅化腐蚀的程度不同,硅蒸汽主要通过材料的孔洞以及缺陷扩散进入材料内部进行腐蚀,腐蚀造成材料表面产生大量的裂纹,并且会造成C/C复合材料以及硬质碳毡材料内部严重的破坏。材料中碳纤维的存在方式以及纤维强度对硅化腐蚀程度有较大影响,C/C复合材料中的腐蚀主要是碳基体和碳纤维的剥离以及碳纤维的缩颈、劈裂等;而由强度较差的短碳纤维为主要组成的硬质碳毡材料的腐蚀最严重,其内部碳纤维出现了明显的碎断、粉化。腐蚀参数对材料硅化腐蚀的程度具有较大影响,随着腐蚀温度的升高以及腐蚀时间的延长,三种碳材料的硅化腐蚀程度均增加。
[Abstract]:Three kinds of carbon materials (graphite C / C composites, hard carbon felt) used in the thermal field of crystal silicon furnace were tested on silicon vapor corrosion under different corrosion conditions. The silicification corrosion behavior of different carbon materials has been studied. The results show that the three kinds of carbon materials have different structure and composition, which leads to the different degree of silicification corrosion between the three carbon materials and the silicon vapor at high temperature. Silicon vapor mainly corrodes through the pores of the material and the diffusion of defects into the material, resulting in a large number of cracks on the surface of the material. The carbon matrix is the main corrosion factor in C / C composites. The carbon matrix is mainly the carbon matrix in C / C composites, and the carbon matrix is the main corrosion factor in C / C composites, which is mainly caused by the existence of carbon fibers and the strength of the fibers in the C / C composites, which have great influence on the corrosion degree of C / C composites. And carbon fiber peeling and necking, The corrosion of hard carbon felt, which is mainly composed of short carbon fiber with poor strength, is the most serious, and the internal carbon fiber is obviously broken and powdered. The corrosion parameters have a great influence on the degree of silicification corrosion of the material. With the increase of corrosion temperature and corrosion time, the silicification corrosion degree of the three carbon materials increased.
【作者单位】：大连理工大学材料科学与工程学院;辽宁省太阳能光伏系统重点实验室;
【基金】：高等学校博士学科点专项科研基金(20130041110004) 国家自然科学基金重点项目(51574057) 中央高校基本科研业务费专项基金(DUT15QY07)~~
【分类号】：TB304;TQ127.11

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