压电陶瓷力输出特性测试系统研究

发布时间：2018-03-24 08:21

本文选题：压电陶瓷　切入点：力输出　出处：《哈尔滨工业大学》2017年硕士论文

【摘要】：压电陶瓷作为一种驱动元件因其响应速度快、力输出大、频率范围广,精度高和结构紧凑等优势,被广泛应用于各种精密系统。压电陶瓷已经成为驱动元件发展的热门方向。压电陶瓷在机械抖动激光陀螺中是成对应用的。由于压电陶瓷力输出不一致,压电陶瓷会被一对中的另一个压坏。此外力输出不同的一对压电陶瓷还会影响激光陀螺的寿命和可靠性。造成一定的经济损失。因此精确地测量压电陶瓷的力输出具有重要的意义本文在压电陶瓷位移输出特性的基础上,结合压电陶瓷的介电性构建了刚体-电极板模型。推导了压电陶瓷的力输出的数学模型。分析可知,压电陶瓷力输出主要取决于压电陶瓷的极化强度,激励电压,自身刚度。此外还受到自身形状和工作频率的影响。本文分析了传统压电陶瓷力输出测量方法的原理。该方法存在测试过程繁琐,易引入误差,测试过程易损伤压电陶瓷元件等问题。针对这些问题提出一种主动式测量方法。相比传统测量方法增加了力施加装置和位移控制装置。测试过程中通过力施加装置将被测元件压回原始长度,并采用位移测量系统精确控制压缩量,记录压电陶瓷不同位移输出时的力输出值。主动式测量方法能测试多种形状的压电陶瓷,测量步骤简单,结果准确。本文依据提出的主动式测量方法,搭建了相应的测试系统。该系统包含基于压电驱动的柔性铰链结构、形状保持架、压电驱动器、电容测微仪、力传感器、工控机及相应硬件电路。根据精度要求,系统地分析了该装置的结构和片状陶瓷的倾斜对测量结果的影响。分析了软件系统功能需求,并设计了基于Labview的上位机软件。主要实现微动结构的位移控制,力输出的数据采集和保存等功能。并对装置进行了性能测试。该装置的最大可测力输出为76.4N,测量分辨率分别为0.03μm和0.01N。本文基于该装置进行了一系列的实验,探讨了压电陶瓷叠堆、长方形压电陶瓷片和环状压电陶瓷片力输出的位移输出之间的关系。并且绘制力输出-位移输出、力输出-电压之间的关系图。该装置测量结果更加的直观和精确。实验结果表明压电陶瓷的力输出特性可以被精确地测量。相比传统的测量方法,新的仪器可以直接测量压电陶瓷的力输出,同时也可以分别绘制出压电陶瓷的力输出和位移输出以及力输出和激励电压之间的关系图。经过实验证明,该压电陶瓷力输出特性测试系统结构设计合理,工作原理新颖,测试精度高且结果可靠,能够实现被测试压电陶瓷力输出特性。
[Abstract]:As a kind of driving element, piezoelectric ceramic has the advantages of high response speed, large force output, wide frequency range, high precision and compact structure. Piezoelectric ceramics have been widely used in various precision systems. Piezoelectric ceramics have become a hot direction in the development of driving components. Piezoelectric ceramics are used in pairs in mechanical dither laser gyroscopes. Piezoelectric ceramics will be crushed by another pair. In addition, a pair of piezoelectric ceramics with different force output will also affect the lifetime and reliability of the laser gyroscope, resulting in a certain economic loss. On the basis of the displacement output characteristics of piezoelectric ceramics, Based on the dielectric properties of piezoelectric ceramics, a rigid body-electrode plate model is constructed. The mathematical model of force output of piezoelectric ceramics is derived. The results show that the force output of piezoelectric ceramics mainly depends on the polarization strength and excitation voltage of piezoelectric ceramics. This paper analyzes the principle of the traditional piezoelectric ceramic force output measurement method. The measurement process is tedious and the error is easy to be introduced in this method. In view of these problems, an active measuring method is put forward. Compared with the traditional measuring method, the force exerting device and displacement control device are added. Press the measured element back into its original length, The displacement measurement system is used to accurately control the compression quantity and to record the force output values of piezoelectric ceramics with different displacements. The active measurement method can measure piezoelectric ceramics with various shapes and the steps of measuring are simple. The results are accurate. According to the active measurement method proposed in this paper, a corresponding testing system is built. The system consists of a piezoelectric driven flexure hinge structure, a shape cage, a piezoelectric actuator, a capacitive micrometer, a force sensor, and so on. Industrial control computer and corresponding hardware circuits. According to the precision requirements, the influence of the structure of the device and the tilting of the flake ceramics on the measurement results is systematically analyzed, and the functional requirements of the software system are analyzed. The software of upper computer based on Labview is designed to control the displacement of fretting structure. The performance of the device is tested. The maximum measurable force output of the device is 76.4N, and the measuring resolution is 0.03 渭 m and 0.01Nrespectively. A series of experiments are carried out based on the device. The relationship between displacement output of piezoelectric ceramic stack, rectangular piezoelectric ceramic plate and annular piezoelectric ceramic plate is discussed, and the output of force output and displacement output are plotted. The experimental results show that the force output characteristics of piezoelectric ceramics can be accurately measured. The new instrument can directly measure the force output of piezoelectric ceramics, and can also draw the relationship between force output and displacement output, force output and excitation voltage, respectively. The testing system has the advantages of reasonable structure, novel working principle, high precision and reliable results, and can realize the force output characteristics of the piezoelectric ceramics tested.
【学位授予单位】：哈尔滨工业大学
【学位级别】：硕士
【学位授予年份】：2017
【分类号】：TQ174.75

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