浅议国内外超净高纯氢氟酸工艺技术差异

发布时间：2018-03-29 21:10

本文选题：集成电路　切入点：超净高纯氢氟酸　出处：《无机盐工业》2017年10期

【摘要】：集成电路是资本密集、技术密集型行业,同时又长期遵循着著名的"摩尔定律",对企业在技术实力和研发投入上有着严苛的要求,相应对原料蚀刻剂超净高纯氢氟酸产品质量也有苛刻要求。从市场需求方面引出国内企业与国外企业的超净高纯氢氟酸质量差异,又详细对比分析了国内企业和国外企业执行标准的差异和原因以及工艺技术制备的差异,末尾结合集成电路的市场状况说明了中国超净高纯氢氟酸制备的发展趋势,以此来促进国内半导体产业的发展。
[Abstract]:The integrated circuit is capital intensive, technology intensive industries, and long-term follow the famous "Moore's law", the enterprise has stringent requirements in technical strength and the research on the corresponding raw materials for ultra pure hydrofluoric acid etching agent product quality is also demanding. The concept of ultra pure hydrofluoric acid quality difference between domestic enterprises and foreign enterprises from the market demand, but also a detailed comparative analysis of the difference between domestic enterprises and foreign enterprises and different standards and preparation technology, combined with the market situation at the end of the integrated circuit shows the development trend of China ultra pure hydrofluoric acid preparation, in order to promote the development of the domestic semiconductor industry.

【作者单位】：多氟多化工股份有限公司;
【分类号】：TQ124.3

【相似文献】