氮化硅陶瓷水下激光与超声复合加工方法及其机理研究

发布时间：2018-04-12 14:43

本文选题：氮化硅 + 水辅助　；参考：《机械工程学报》2017年07期

【摘要】：陶瓷材料具有强度高、硬度大、耐高温、耐腐蚀、耐磨损等优点,但同时也具有难加工的缺点。研究水下激光去除材料的热学模型与氮化硅水解反应,建立水流辅助超声与激光复合加工试验装置,分别开展不同条件、不同参数下对氮化硅的刻槽加工试验,并采用影像仪和电子显微镜对刻槽深度与表面质量观测比较,应用能谱仪检测生成物成分,综合分析加工机理。研究结果表明在有水辅助激光加工氮化硅过程中,因水的冷却作用减少了激光去除材料的有效能量,刻蚀深度随之变小,但激光作用区的温升加剧氮化硅水解,同时水流带走二氧化硅等生成物,促使加工表面质量明显提高;在水下激光与超声复合加工中,超声振动加大了氮化硅表面水的对流与物质的抛出,提高了刻蚀速率。
[Abstract]:Ceramic materials have the advantages of high strength, high hardness, high temperature resistance, corrosion resistance, wear resistance and so on.The thermal model of underwater laser material removal and the hydrolysis reaction of silicon nitride were studied. The experimental equipment of flow assisted ultrasonic and laser combined processing was established, and the grooving experiments of silicon nitride were carried out under different conditions and different parameters.The groove depth and surface quality were observed and compared with those of electron microscope, and the components of the product were detected by energy spectrometer, and the processing mechanism was analyzed synthetically.The results show that in the process of laser assisted laser processing of silicon nitride with water, the effective energy of the laser material is reduced because of the cooling effect of water, and the etching depth becomes smaller, but the temperature rise of the laser action zone intensifies the hydrolysis of silicon nitride.At the same time, the flow takes away the silicon dioxide and other products, which makes the quality of the machined surface improve obviously. In the underwater laser and ultrasonic processing, ultrasonic vibration increases the water convection and material ejection on the surface of silicon nitride, and improves the etching rate.
【作者单位】：安徽建筑大学机械与电气工程学院;江南大学机械工程学院;
【基金】：国家自然科学基金(511752290) 安徽省自然科学基金(1208085ME79) 安徽省高校自然科学研究(KJ2015A013,KJ2015A050)资助项目
【分类号】：TQ174.6

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