光学玻璃超声振动铣磨材料去除及表面质量研究

发布时间：2018-04-20 07:54

本文选题：光学玻璃 + 超声振动铣磨　；参考：《哈尔滨工业大学》2015年硕士论文

【摘要】：光学玻璃为各向同性的高新技术材料,因其优良的化学、机械、光学、热力学等性能而被广泛应用于光学仪器的构件的制作。但光学玻璃是一种典型的硬脆材料,传统加工过程中易产生断裂、崩碎、裂纹等加工缺陷,难以使加工表面质量得到保证,进而限制了其更广泛的应用。超声振动铣磨加工技术由于磨粒切削刃与工件断续接触的加工特点尤其适用于硬脆材料加工,相比较普通切削具有明显的优越性。本文研究了光学玻璃超声振动铣磨加工时材料去除脆塑转变以及铣磨加工参数、超声振动振幅对材料加工表面粗糙度和亚表面损伤的影响,以期为实现光学玻璃低损伤磨削加工提供技术支持。本文以分析光学玻璃超声振动铣磨加工材料去除脆塑转变为出发点,建立了光学玻璃脆塑转变模型,在此基础上对BK7和JGS1两种光学玻璃进行了显微压痕试验和单颗粒超声振动变切深刻划试验,并对压痕区域、刻划沟槽的表面形貌进行了检测分析。结合两种光学玻璃压痕尺寸的测量结果,研究了不同加载载荷对光学玻璃的维氏硬度、断裂韧性的影响规律,同时结合临界刻划力和临界刻划深度的测量结果研究了超声振动振幅对材料临界加载载荷、临界切削深度的影响规律。为研究超声振动参数和铣磨加工参数对光学玻璃超声振动铣磨加工工件表面粗糙的影响规律,本文对BK7和JGS1两种光学玻璃进行了以机床主轴转速、工件进给速度、切削深度和超声振动振幅为参数的单因素试验,研究了工件表面粗糙度随不同参数的变化规律,并根据不同参数下的表面粗糙度值建立了光学玻璃超声振动铣磨加工预测模型,为实现光学玻璃材料的精密加工工艺参数的优选奠定了基础。在不同加工参数下的光学玻璃超声振动铣磨加工工艺试验基础上,采用机械抛光法结合HF酸腐蚀法对铣磨加工后的表面进行了处理。利用扫描电子显微镜对铣磨加工区域进行显微观测,并对亚表面裂纹种类和尺寸进行了检测,得到了超声振动条件下光学玻璃材料亚表面损伤的形式与特征,研究了不同参数对亚表面损伤程度的影响规律,为探索减轻亚表面损伤的技术措施提供依据。
[Abstract]:Optical glass is an isotropic high-tech material, which is widely used in the fabrication of optical instruments because of its excellent chemical, mechanical, optical and thermodynamic properties. However, optical glass is a kind of typical hard and brittle material. It is easy to produce fracture, breakage, crack and other processing defects in the traditional processing process, so it is difficult to guarantee the quality of the machined surface, which limits its wider application. Ultrasonic vibration milling and grinding technology is especially suitable for machining hard and brittle materials due to the processing characteristics of intermittent contact between abrasive cutting edge and workpiece. Compared with common cutting, ultrasonic vibration milling and grinding technology has obvious advantages. In this paper, the effects of material removal of brittle plastic transition, milling parameters and amplitude of ultrasonic vibration on surface roughness and subsurface damage of optical glass during ultrasonic vibration milling are studied. The aim is to provide technical support for low damage grinding of optical glass. In this paper, an optical glass brittle plastic transition model is established based on the analysis of the brittle plastic transition of optical glass processed by ultrasonic vibration milling. On the basis of these experiments, two kinds of optical glass, BK7 and JGS1, were tested by micro-indentation test and ultrasonic vibration with single particle, and the surface morphology of grooves in indentation region was analyzed. Combined with the measuring results of indentation size of two kinds of optical glass, the effect of different loading loads on Vickers hardness and fracture toughness of optical glass was studied. At the same time, the influence of ultrasonic vibration amplitude on critical loading load and critical cutting depth of materials is studied by combining the measurement results of critical scratching force and critical depth. In order to study the influence of ultrasonic vibration parameters and milling and grinding parameters on the roughness of workpiece surface of optical glass by ultrasonic vibration milling and grinding, two kinds of optical glass (BK7 and JGS1) have been studied in this paper by the spindle speed of machine tool and the feed speed of workpiece. The variation of workpiece surface roughness with different parameters was studied in the single factor experiment of cutting depth and ultrasonic vibration amplitude, and the prediction model of ultrasonic vibration milling and grinding of optical glass was established according to the surface roughness value of different parameters. It lays a foundation for optimizing the processing parameters of optical glass materials. Based on the experimental results of ultrasonic vibration milling and grinding of optical glass with different processing parameters, the surface after milling and grinding was treated by mechanical polishing and HF acid corrosion. Scanning electron microscope (SEM) was used to observe the milling and grinding area, and the types and sizes of subsurface cracks were detected. The forms and characteristics of subsurface damage of optical glass materials under ultrasonic vibration were obtained. The influence of different parameters on the degree of subsurface damage is studied, which provides the basis for exploring the technical measures to reduce the subsurface damage.
【学位授予单位】：哈尔滨工业大学
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：TQ171.6

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