基于椭偏法的平板玻璃间隙距离测量研究

发布时间：2018-04-27 19:45

本文选题：位移测量 + 平板玻璃　；参考：《西安工业大学》2017年硕士论文

【摘要】：随着MEMS,微电子制造技术的不断发展,人们对于元件加工精度的要求越来越高,而实现这些的前提是能够达到纳米级的精密测量技术。在目前的技术当中,椭偏法以其高精度,高灵敏度,能够实现非接触测量等优点而被广泛的应用于光电器件,材料,生物科技等领域当中。本文基于椭偏法,提出了一种测量平板玻璃间隙距离的方法。使用椭偏光度法,在固定偏振片和1/4波片的情况下,建立起探测器采集到的光信号强度与平板玻璃间隙距离的关系,并用MATLAB进行仿真,分析了这种测量方法的精度及可行性;通过旋转起偏器和检偏器,探测器采集到的光信号强度为0时,起偏器和检偏器的透光方向与被测量之间的函数关系,用MATLAB进行仿真,对不同入射角时的数据结果进行了对比,得出了使用这种方法进行测量时最佳的入射角大小,以及测量精度,对实验仪器存在的测角误差对测量结果的影响进行了分析,提出了减小误差的方法;提出了改进的消光法,即采用旋转1/4波片和检偏器的方式,实现对出射光任意椭圆偏振态的测量。这种方法能够由探测器接收的光信号强度为0时,1/4波片快慢轴的方向和检偏器透光方向,根据函数关系对被测量进行计算;针对消光法搭建了实验平台,进行了间隙距离的测量,并对理论仿真结果进行了验证,对实验过程中造成误差的因素进行了分析。综合仿真数据和实验数据的结果,采用消光式椭偏法测量平板玻璃的间隙距离时,当入射角为60°时,通过选取符合要求的测量仪器,这种方法能够达到10nm的测量精度,测量范围能够达到350nm。
[Abstract]:With the continuous development of MEMS and microelectronic manufacturing technology, the requirement of machining accuracy of components is becoming higher and higher, and the premise to achieve these is to achieve nano-scale precision measurement technology. Among the current technologies ellipsometry is widely used in the fields of optoelectronic devices materials biotechnology and so on because of its high accuracy high sensitivity and the ability to realize non-contact measurement. Based on ellipsometry, a method for measuring gap distance of flat glass is presented. In the case of fixed polarizer and 1 / 4 wave plate, the relationship between the intensity of optical signal collected by the detector and the gap distance of flat glass is established by using ellipsometry. The accuracy and feasibility of this method are analyzed by MATLAB simulation. Through rotating polarizer and polarizer, when the intensity of optical signal collected by detector is 0, the function relationship between the transmittance direction of polarizer and the measurement is simulated by MATLAB, and the data results at different incident angles are compared. The optimum incidence angle and measurement precision are obtained. The influence of the angle error of the experimental instrument on the measurement results is analyzed, the method of reducing the error is put forward, and the improved extinction method is put forward. The method of rotating 1 / 4 wave plate and polarizer is used to measure any elliptical polarization state of outgoing light. This method can be used to calculate the direction of the fast and slow axis of 1 / 4 wave plate and the transmittance direction of the polarizer when the intensity of the optical signal received by the detector is 0, and the experimental platform is built for the extinction method according to the function relation. The gap distance is measured, the theoretical simulation results are verified, and the error factors in the experiment are analyzed. When the gap distance of flat glass is measured by using extinction ellipsometry, when the incident angle is 60 掳, the measurement precision of 10nm can be achieved by selecting the measuring instruments that meet the requirements. The measurement range can reach 350 nm.
【学位授予单位】：西安工业大学
【学位级别】：硕士
【学位授予年份】：2017
【分类号】：TQ171.721

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