玻璃微结构电解电火花铣削加工试验研究

发布时间：2018-04-30 22:15

本文选题：微细加工 + 电解电火花铣削　；参考：《组合机床与自动化加工技术》2017年11期

【摘要】：为满足石英玻璃等非导电硬脆材料微结构的加工需求,对微细电解电火花铣削加工工艺进行了深入的试验研究,在玻璃工件上进行了一系列微细电解电火花铣削加工工艺试验。首先,基于电解电火花加工的原理搭建了微细电解电火花铣削试验平台;其次,通过对比试验,研究了加工电压、脉冲频率、占空比和进给速度等工艺参数对铣削槽宽的影响,并通过优化工艺参数加工出微槽阵列;最后,成功加工出多个玻璃微结构包括二维微流道和三维微结构,试验结果表明微细电解电火花铣削工艺在加工非导电硬脆材料微结构方面具有很大潜力。
[Abstract]:In order to meet the requirement of micro-structure machining of non-conductive hard brittle materials such as quartz glass, a series of micro-electrolytic EDM milling experiments were carried out on glass workpiece. Firstly, based on the principle of electrolysis EDM, a micro-electrolysis EDM milling test platform is built. Secondly, the effects of processing parameters, such as machining voltage, pulse frequency, duty cycle and feed speed, on the width of milling slot are studied. The microgroove array is fabricated by optimizing the process parameters. Finally, several glass microstructures including two dimensional microchannels and three dimensional microstructures are successfully fabricated. The experimental results show that the micro-electrolysis EDM process has great potential in machining the microstructure of non-conductive hard brittle materials.
【作者单位】：山东大学机械工程学院高效洁净机械制造教育部重点实验室;山东大学力学与机电装备联合工程技术研究中心;
【基金】：国家自然科学基金项目(51305238) 中国博士后基金项目(2015M572023) 山东大学(威海)青年学者未来计划资助项目(2015WHWLJH03)
【分类号】：TQ171.68

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