粉体及制备工艺对IGZO靶材致密度及形貌的影响

发布时间：2018-05-18 02:38

  本文选题：IGZO靶材 + 共沉淀　； 参考：《材料热处理学报》2017年07期

【摘要】：分别用化学共沉淀粉和单元氧化物混合粉为原料烧结制备In_2Ga_2ZnO_7(IGZO)靶材,对比研究了煅烧温度、烧结温度、烧结气氛、保温对靶材烧结致密度和微观结构的影响。结果表明,混合粉比共沉淀粉更容易促进烧结致密化,但通过选择合适的煅烧温度和烧结工艺,两种原料粉均可获得密度高于99.5%的IGZO靶材。靶材烧成前1100℃保温效果最好,最佳烧成温度区间为1400~1450℃。共沉淀粉优选煅烧温区为900~1050℃,烧结时对氧气气氛更敏感;混合粉优选煅烧温区为750~900℃,且在氧气气氛下烧结优于空气。此外,共沉淀粉烧结体晶粒均匀分布、晶界清晰,而混合粉的烧结体表面晶界模糊,呈"网格状"和"层状"形貌。
[Abstract]:Ince _ 2Ga _ 2ZnO _ (7) IGZO targets were sintered by chemical coprecipitation powder and unit oxide mixed powder respectively. The effects of calcination temperature, sintering atmosphere and heat preservation on the density and microstructure of the target sintered were compared. The results show that the mixed powder can promote the sintering densification more easily than the coprecipitation powder, but by choosing the proper calcination temperature and sintering process, the IGZO target with density higher than 99.5% can be obtained by selecting the proper calcination temperature and sintering process. The best heat preservation effect is 1100 鈩，

本文编号：1904032