单晶蓝宝石衬底晶片的化学机械抛光工艺研究

发布时间：2018-05-18 06:19

本文选题：蓝宝石衬底 + 化学机械抛光　；参考：《表面技术》2017年03期

【摘要】：目的设计单晶蓝宝石衬底化学机械抛光的合理方案,探究主要抛光工艺参数对抛光衬底的表面质量和材料去除率的影响,并得到一组材料去除率高且表面质量满足要求的抛光工艺参数。方法借助原子力显微镜和精密天平分别对衬底表面形貌和材料去除率进行分析,采用单因素实验法探究了抛光粒子、抛光时间、抛光压力和抛光盘转速对蓝宝石衬底化学机械抛光的表面质量和材料去除率的影响,并设计合理的交互正交优化实验寻求一组较优的抛光工艺参数。结果在蓝宝石衬底化学机械精抛过程中,在抛光时间为0.5 h、抛光压力为45.09 k Pa、抛光盘转速为50 r/min、SiO_2抛光液粒子质量分数为15%、抛光液流量为60 m L/min的条件下,蓝宝石衬底材料的去除率达41.89 nm/min,表面粗糙度降低至0.342 nm,衬底表面台阶结构清晰,满足后续外延工序的要求。结论采用化学机械抛光技术和优化的工艺参数,可同时获得较高的材料去除率和高质量的蓝宝石衬底表面。
[Abstract]:Objective to design a reasonable scheme for chemical and mechanical polishing of single crystal sapphire substrates, and to explore the effects of main polishing process parameters on the surface quality and material removal rate of polished sapphire substrates. A group of polishing process parameters with high material removal rate and surface quality were obtained. Methods the surface morphology and material removal rate of the substrate were analyzed by atomic force microscope (AFM) and precision balance. The polishing particle and polishing time were investigated by single factor experiment. The effects of polishing pressure and polishing speed on the surface quality and material removal rate of the chemical mechanical polishing of sapphire substrate were studied. Results in the process of chemical mechanical polishing on sapphire substrate, the polishing time was 0.5 h, the polishing pressure was 45.09 KPA, the rotation speed of polishing disc was 50%, the mass fraction of polishing liquid particles was 15 and the flow rate of polishing liquid was 60 m L/min. The removal rate of sapphire substrate is 41.89nm / min, and the surface roughness is reduced to 0.342 nm. The surface step structure of the substrate is clear and meets the requirements of the subsequent epitaxial process. Conclusion the high material removal rate and high quality sapphire substrate surface can be obtained by using chemical mechanical polishing technology and optimized process parameters.
【作者单位】：中南大学机电工程学院;中南大学高性能复杂制造国家重点实验室;
【基金】：湖南省自然科学基金(2015JJ2153) 国家自然科学基金(51275534)~~
【分类号】：TQ164;TQ050.6

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