钛酸钡陶瓷基片双面研抛加工特性研究

发布时间：2018-05-24 02:16

本文选题：钛酸钡陶瓷 + 纳米压痕　；参考：《广东工业大学》2015年硕士论文

【摘要】：钛酸钡陶瓷是具有钙钛矿结构的铁电材料中最常用的一种,以其优良的铁电性能、良好的压电性能、高介电常数、低介电损耗以及耐高压性能等特点,广泛应用在军事、原子能、航空航天、金属、石油化工、日常家电等各关系领域。采用烧结工艺制得的钛酸钡陶瓷基片,表面不平整且尺寸也不符合要求,同时钛酸钡陶瓷是软脆材料,加工困难且成本较高。研磨抛光是改善钛酸钡陶瓷表面质量和达到尺寸要求的有效方法,无破碎损耗的高效加工是关键。因此本文选择钛酸钡陶瓷基片作为研究对象,探讨其材料去除机理、研抛加工表面形成过程以及研磨抛光工艺。本文主要进行了以下几方面的研究工作,分析了钛酸钡陶瓷基片双面研磨的加工机理及材料去除形式推导出UNIPOL-160D双面研磨抛光机中单颗磨粒相对工件的运动轨迹方程,并用Matlab程序进行了单颗磨粒运动轨迹仿真,分析了各因素对轨迹形态的影响；然后在单颗磨粒轨迹仿真的基础上进行了多颗粒磨粒共同作用时的运动轨迹仿真,分析了研磨盘转速、研磨时间、磨料分布对轨迹和研磨效果的影响。采用Nano Indenter G200纳米压入式系统对钛酸钡陶瓷基片进行了纳米压痕实验,测得其弹性模量E、硬度H、断裂韧性Kc等力学性能参数,并用Bifano模型计算得到钛酸钡陶瓷基片脆塑性转换的临界切深。进行了钛酸钡陶瓷基片双面研磨抛光工艺实验的研究,系统分析了磨料种类、磨料粒径、研磨压力、研磨盘转速、研磨液流量、研磨液浓度等工艺参数对基片研磨效果的影响。通过优选工艺参数,得到了一套高效的钛酸钡陶瓷基片双面研磨工艺。同时对研磨后的基片进行了双面抛光,得到了表面粗糙度Ra6nm的超光滑表面。
[Abstract]:Barium titanate ceramics is one of the most commonly used ferroelectric materials with perovskite structure. Because of its excellent ferroelectric properties, good piezoelectric properties, high dielectric constant, low dielectric loss and high voltage resistance, barium titanate ceramics are widely used in military affairs. Nuclear energy, aerospace, metals, petrochemical, household appliances and other related fields. The surface of barium titanate ceramic substrate prepared by sintering process is not smooth and the size does not meet the requirements. At the same time, barium titanate ceramic is a soft and brittle material, which is difficult to process and high cost. Grinding and polishing is an effective method to improve the surface quality of barium titanate ceramics and meet the requirements of size. In this paper, barium titanate ceramic substrate is chosen as the research object, and the material removal mechanism, surface formation process and grinding and polishing process of barium titanate ceramic substrate are discussed. In this paper, the processing mechanism and material removal form of barium titanate ceramic substrate double-sided grinding are analyzed, and the motion trajectory equation of single abrasive particle relative to workpiece in UNIPOL-160D double-sided polishing machine is derived. The movement trajectory of single abrasive particle is simulated with Matlab program, and the influence of various factors on the trajectory shape is analyzed, and then the motion trajectory simulation of multi-particle abrasive particle interaction is carried out on the basis of single abrasive particle trajectory simulation. The effects of grinding disc speed, grinding time and abrasive distribution on the track and grinding effect were analyzed. The nano-indentation test of barium titanate ceramic substrate was carried out by Nano Indenter G200 nano-indentation system. The mechanical properties such as elastic modulus E, hardness H and fracture toughness K c were measured. The critical shear depth of brittle-plastic transition of barium titanate ceramic substrate was calculated by Bifano model. The experiment of double-sided grinding and polishing of barium titanate ceramic substrate was carried out. The effects of abrasive type, abrasive particle size, grinding pressure, rotating speed of grinding disk, flow rate of grinding fluid and concentration of grinding fluid on the grinding effect of substrate were systematically analyzed. A high efficient double-side grinding process of barium titanate ceramic substrate was obtained by optimizing the technological parameters. At the same time, the surface roughness of Ra6nm was obtained by double surface polishing.
【学位授予单位】：广东工业大学
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：TQ174.7

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