MPCVD合成单晶金刚石的外延生长研究

发布时间：2018-06-19 13:20

本文选题：微波等离子化学气相沉积法 + 合成金刚石　；参考：《石家庄经济学院》2015年硕士论文

【摘要】：金刚石由于特殊的晶体结构使得其具有自然界已知材料中最高的硬度,同时还具有室温下最高的热导率,极低的热膨胀系数,优良的半导体性能和化学稳定性以及极佳的光学性能(高折射率、高色散值和高光学透过性)等多种优异性质,具有广泛的工业应用前景。但是,天然金刚石由于受到产量少,品质差异大,晶体形态及尺寸难以满足工业要求,价格高等不利因素的影响,严重阻碍了人们对其开发利用。微波等离子化学气相沉积法(Microwave Plasma Chemical Vapor Deposition,MPCVD)是利用微波等离子体化学气相沉积装置,在一定的温度和压力条件下生长金刚石晶体的方法,该方法具有生产成本低、沉积速度快、产品质量高等优点,是目前化学气相沉积法合成金刚石领域公认的最佳方法。本文通过多次实验,探索研究甲烷、氢气、氮气和氧气以及种晶类型、生长面、放置方式和反应仓压强、基底温度对MPCVD合成单晶金刚石的影响。通过常规宝石学仪器以及拉曼光谱、红外光谱等现代测试技术对实验样品进行检测分析,总结了MPCVD单晶金刚石的特征。最后总结展望其在工业领域及宝石学领域的应用前景。
[Abstract]:Due to its special crystal structure, diamond has the highest hardness of known materials in nature, the highest thermal conductivity at room temperature, and extremely low coefficient of thermal expansion. Excellent semiconductor properties, chemical stability and excellent optical properties, such as high refractive index, high dispersion value and high optical transmittance, have a wide range of industrial applications. However, due to the influence of unfavorable factors, such as low output, great difference in quality, difficult to meet the requirements of industry, high price and so on, the development and utilization of natural diamond are seriously hindered. Microwave Plasma Chemical Vapor deposition (MPCVD) is a method to grow diamond crystals under certain temperature and pressure by microwave plasma chemical vapor deposition (MPCVD). The method has the advantages of low production cost and fast deposition rate. High product quality is the best method in the field of diamond synthesis by chemical vapor deposition. In this paper, the effects of methane, hydrogen, nitrogen and oxygen on the synthesis of monocrystalline diamond by MPCVD were studied. The characteristics of MPCVD single crystal diamond were summarized by using conventional gemstone instruments, Raman spectroscopy, infrared spectroscopy and other modern testing techniques to detect and analyze the experimental samples. Finally, the prospect of its application in the field of industry and gemology is summarized and prospected.
【学位授予单位】：石家庄经济学院
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：TQ163

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