大行程纳米级压电陶瓷驱动控制系统研究

发布时间：2018-06-28 07:26

  本文选题：压电陶瓷 + 微位移放大机构　； 参考：《华侨大学》2016年硕士论文

【摘要】：压电陶瓷是一种能将机械能和电能相互转换的信息功能陶瓷材料,具有位移分辨率高、刚度大、响应快、无噪声等优点,在微机械、微电子、精密加工、生物医学、机器人和航空航天等领域得到广泛应用。然而,压电陶瓷本身固有的输出位移小、迟滞、蠕变、非线性等特性,严重影响到精密定位系统的性能。本论文在对压电陶瓷迟滞、蠕变、非线性等特性进行研究的基础上,通过设计柔性铰链微位移放大机构将压电陶瓷的输出位移进行放大,同时利用神经网络建立压电陶瓷蠕变模型,对蠕变误差进行预测和修正。具体研究内容如下:首先,对压电陶瓷固有特性进行研究。基于极化理论分析了迟滞特性的产生机理,利用晶格间摩擦分析了蠕变特性,同时对非线性和位移重复性等特性展开分析,并结合实验对压电陶瓷特性进行验证。其次,设计了一个基于二级杠杆的柔性铰链微位移放大机构,经过放大后的压电陶瓷输出最大可达0.3mm。通过理论计算、ANSYS仿真和实验验证,对该放大机构进行了研究和分析,该机构分辨力约为10nm,并通过实验对放大前后的蠕变量进行对比研究。最后,利用神经网络建立压电陶瓷蠕变特性模型。通过建立蠕变模型描述蠕变量与时间、电压之间的关系;利用遗传算法对神经网络进行优化,提高神经网络的预测精度;采用反向电压法修正压电陶瓷蠕变误差。通过实验验证蠕变模型,预测蠕变量,并验证反向电压法对减小蠕变误差的有效性。通过理论研究和实验验证,本文的研究工作对于压电陶瓷的高精度定位有着重要的理论意义和实际应用价值。
[Abstract]:Piezoelectric ceramic is a kind of information function ceramic material which can convert mechanical energy and electric energy. It has the advantages of high displacement resolution, high stiffness, fast response, no noise, etc., in micromachined, microelectronics, precision machining, biomedicine, etc. Robotics, aerospace and other fields have been widely used. However, the inherent characteristics of piezoelectric ceramics, such as small output displacement, hysteresis, creep, nonlinear and so on, seriously affect the performance of precision positioning system. Based on the study of hysteresis, creep and nonlinearity of piezoelectric ceramics, the output displacement of piezoelectric ceramics is amplified by designing a flexible hinge micro-displacement amplification mechanism. At the same time, the creep model of piezoelectric ceramics is established by neural network, and the creep error is predicted and corrected. The specific research contents are as follows: firstly, the inherent characteristics of piezoelectric ceramics are studied. Based on polarization theory, the mechanism of hysteresis is analyzed, the creep property is analyzed by friction between lattice, the nonlinear and displacement repeatability are analyzed, and the characteristics of piezoelectric ceramics are verified by experiments. Secondly, a flexible hinge micro-displacement amplification mechanism based on two-stage lever is designed. The maximum output of piezoelectric ceramics after amplification is 0.3 mm. Through theoretical calculation and experimental verification, this amplification mechanism is studied and analyzed. The resolution of the mechanism is about 10 nm, and the creep before and after amplification is compared by experiments. Finally, the creep characteristic model of piezoelectric ceramics is established by neural network. The creep model is established to describe the relationship between creep amount, time and voltage; genetic algorithm is used to optimize the neural network to improve the prediction accuracy of neural network; and the reverse voltage method is used to correct the creep error of piezoelectric ceramics. The creep model is verified by experiments, the creep amount is predicted, and the effectiveness of the reverse voltage method to reduce the creep error is verified. Through theoretical research and experimental verification, the research work in this paper has important theoretical significance and practical application value for high precision positioning of piezoelectric ceramics.
【学位授予单位】：华侨大学
【学位级别】：硕士
【学位授予年份】：2016
【分类号】：TQ174.1;TP273
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本文编号：2077212