铌酸锂微畴结构加工与检测

发布时间：2018-11-03 13:23

【摘要】：铌酸锂是一种非常优秀的人工晶体,它有着稳定的机械性能,耐高温、抗腐蚀,易加工,价格低廉。并且它是集声光、压电和非线性光学等多种效应于一身的多功能晶体,它拥有无机物中最大的非线性光学系数。通过对铌酸锂晶体的铁电畴周期性反转制作的周期性极化铌酸锂(periodically poled lithium niobate, PPLN)已经广泛的应用于激光的倍频、光参量振荡和光波导等方面。本文的主要研究内容是对铌酸锂微畴结构加工工艺的探究,主要包括以下两个方面：1.搭建了一套针尖加高压直写式的铌酸锂微畴结构加工实验平台,设计了相关的机械结构,包括微动平台,支撑调平装置,针尖观察和调节装置,样品台等多个部分的结构设计。组建了整个平台的运动控制系统,通过GALIL控制器实现平台的运动控制和高压脉冲电源的控制,并且编写了PC端的控制软件。2.实验了在不同条件下的铌酸锂晶体的点畴和线畴的制作。通过无损的偏振光检测法观察到了制作好的畴结构,并通过USB采集设备采集到了相应的畴图像。对比了电压、停留时间和速度这三个因素对畴尺寸的影响。得出表面畴结构随着电压的增大或者加电压持续时间的增大而增大,随着速度的增大而减小的结论。并在最后通过氢氟酸腐蚀法验证了偏振光检测得到的结果。
[Abstract]:Lithium niobate is an excellent intraocular crystal with stable mechanical properties, high temperature resistance, corrosion resistance, easy processing and low price. It is a multifunctional crystal with acousto-optic, piezoelectric and nonlinear optical effects. It has the largest nonlinear optical coefficient in inorganic materials. The periodically polarized lithium niobate (periodically poled lithium niobate, PPLN) fabricated by periodically reversing ferroelectric domain of lithium niobate crystal has been widely used in laser frequency doubling, optical parametric oscillation and optical waveguide. The main content of this paper is to explore the fabrication technology of lithium niobate microdomain structure, including the following two aspects: 1. An experimental platform for the fabrication of lithium niobate microdomain structure with pinpoint and high pressure direct writing was built. The related mechanical structures were designed, including the fretting platform, the support leveling device, the tip observation and adjusting device, the sample table and so on. The motion control system of the whole platform is set up. The motion control of the platform and the control of the high voltage pulse power supply are realized by GALIL controller. The control software of the PC terminal is written. 2. The fabrication of point domain and line domain of lithium niobate crystal under different conditions was studied. The domain structure was observed by nondestructive polarized light detection, and the domain images were collected by USB acquisition device. The effects of voltage, residence time and velocity on domain size are compared. It is concluded that the surface domain structure increases with the increase of the voltage or the duration of the applied voltage, and decreases with the increase of the velocity. Finally, the results of polarizing light detection were verified by hydrofluoric acid etching method.
【学位授予单位】：中国科学技术大学
【学位级别】：硕士
【学位授予年份】：2016
【分类号】：TQ131.11

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