基于透明陶瓷的二元光学元件的设计与制作
发布时间：2018-11-11 10:33
【摘要】：二元光学元件不仅是制造微光机电系统的关键元器件,而且是制造小型光电子系统的关键元器件。它不仅具有尺寸小、性价比高等优点,并且能够实现普通光学元器件难以实现的阵列、转换、成像和集成等新功能。随着科学技术的迅猛发展,二元光学元件已显示出越来越重要的应用价值和广阔的应用前景,同时对二元光学元件的加工与应用提出了越来越高的要求。透明陶瓷凭借其出众的物理化学性能,具有和玻璃相比拟的优异光学性能,成为材料领域研究的新宠,已显现出良好的应用前景和重要作用,其应用领域也在不断为人们所开拓。本论文针对二元光学元件的众多优点之一——宽广的材料可选性,展开探索性研究,尝试以透明陶瓷为基底材料来代替常见的基材,制作二元光学元件。目前常见的二元光学元件基材有硅片、玻璃等,它们有着各自的优点,但在日常使用中也暴露一定的不足。透明陶瓷拥有高强度、耐高温、耐酸碱腐蚀等特性,在多波段、宽光谱内拥有良好的透明性,即使在远红外区仍有80%的直线透过率。用透明陶瓷作为元件基底材料,能够使得光学元件在更为复杂、苛刻的环境中发挥作用,拓宽了二元光学元件的应用范围。鉴于透明陶瓷固有的特性,本文采用“加法”和“减法”两种方案进行研究。“加法”方案中,鉴于透明陶瓷耐酸碱腐蚀的特性,结合光刻中的“加法”工艺,首先通过磁控溅射镀膜技术在透明陶瓷表面溅射一层金属膜。金属膜与透明陶瓷结合牢固。借助数字微光刻技术和接触式光刻技术实现元件结构的转印,使得元件留在金属膜层。这样既使得二元光学元件能够发挥作用,又让透明陶瓷的优异特性得以保留。“减法”方案用于进一步探索。借助感应耦合等离子体刻蚀系统,以金属膜层为硬掩模,进一步刻蚀透明陶瓷。另外,采用飞秒激光直接在透明陶瓷本体表面烧蚀二元光学元件。本文采用多种二元光学元件进行实验,包括一维光栅、正交光栅、达曼光栅、方形波带片和菲涅耳波带片等基本元件,同时也有自主设计的、由电脑编程实现的二元全息图和涡旋光束元件。从多方面验证了以透明陶瓷制作二元光学元件的可行性。借助光学轮廓仪和显微镜对实验结果进行分析,并重现了样品元件的衍射图样。
[Abstract]:Binary optical elements are not only the key components in the fabrication of microoptic electromechanical systems, but also the key components in the manufacture of small optoelectronic systems. It not only has the advantages of small size and high performance-to-price ratio, but also can realize the new functions of array, conversion, imaging and integration, which are difficult for ordinary optical components to realize. With the rapid development of science and technology, binary optical elements have shown more and more important application value and broad application prospects. At the same time, the processing and application of binary optical elements have put forward more and more high requirements. Due to its outstanding physical and chemical properties and excellent optical properties compared with glass, transparent ceramics have become a new favorite in the field of material research, and have shown good application prospects and important role. Its application field is also being continuously developed by people. In this paper, aiming at one of the advantages of binary optical element, which is the wide material selection, we have carried out an exploratory study, and we try to use transparent ceramics as substrate instead of common substrate to make binary optical element. At present, the common binary optical element substrates are silicon wafer, glass and so on. They have their own advantages, but they also expose some shortcomings in their daily use. Transparent ceramics have high strength, high temperature resistance, acid and alkali corrosion resistance and good transparency in multi-band and wide spectrum. Even in the far infrared region, there are still 80% linear transmittance. Using transparent ceramics as substrate material can make optical elements play a role in more complex and harsh environment, and broaden the application of binary optical elements. In view of the inherent characteristics of transparent ceramics, two schemes of "addition" and "subtraction" are adopted in this paper. In the "addition" scheme, in view of the acid-alkali corrosion resistance of transparent ceramics, combined with the "addition" process in photolithography, a metal film was first deposited on the surface of transparent ceramics by magnetron sputtering. The metal film is firmly bonded with transparent ceramics. By means of digital lithography and contact lithography, the elements are transferred to the metal film. In this way, binary optical elements can function and the excellent properties of transparent ceramics can be preserved. The subtraction scheme is used for further exploration. By means of inductively coupled plasma etching system, transparent ceramics were further etched with metal film as hard mask. In addition, femtosecond laser is used to ablation binary optical elements directly on the surface of transparent ceramics. In this paper, we use a variety of binary optical elements to carry out experiments, including one-dimensional grating, orthogonal grating, Darman grating, square band plate and Fresnel band plate. Binary hologram and vortex beam element realized by computer programming. The feasibility of using transparent ceramics to fabricate binary optical elements has been verified from many aspects. The experimental results were analyzed by optical profilometer and microscope, and the diffraction patterns of the sample elements were reconstructed.
【学位授予单位】：南昌航空大学
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：TQ174.758.23
本文编号：2324576
[Abstract]:Binary optical elements are not only the key components in the fabrication of microoptic electromechanical systems, but also the key components in the manufacture of small optoelectronic systems. It not only has the advantages of small size and high performance-to-price ratio, but also can realize the new functions of array, conversion, imaging and integration, which are difficult for ordinary optical components to realize. With the rapid development of science and technology, binary optical elements have shown more and more important application value and broad application prospects. At the same time, the processing and application of binary optical elements have put forward more and more high requirements. Due to its outstanding physical and chemical properties and excellent optical properties compared with glass, transparent ceramics have become a new favorite in the field of material research, and have shown good application prospects and important role. Its application field is also being continuously developed by people. In this paper, aiming at one of the advantages of binary optical element, which is the wide material selection, we have carried out an exploratory study, and we try to use transparent ceramics as substrate instead of common substrate to make binary optical element. At present, the common binary optical element substrates are silicon wafer, glass and so on. They have their own advantages, but they also expose some shortcomings in their daily use. Transparent ceramics have high strength, high temperature resistance, acid and alkali corrosion resistance and good transparency in multi-band and wide spectrum. Even in the far infrared region, there are still 80% linear transmittance. Using transparent ceramics as substrate material can make optical elements play a role in more complex and harsh environment, and broaden the application of binary optical elements. In view of the inherent characteristics of transparent ceramics, two schemes of "addition" and "subtraction" are adopted in this paper. In the "addition" scheme, in view of the acid-alkali corrosion resistance of transparent ceramics, combined with the "addition" process in photolithography, a metal film was first deposited on the surface of transparent ceramics by magnetron sputtering. The metal film is firmly bonded with transparent ceramics. By means of digital lithography and contact lithography, the elements are transferred to the metal film. In this way, binary optical elements can function and the excellent properties of transparent ceramics can be preserved. The subtraction scheme is used for further exploration. By means of inductively coupled plasma etching system, transparent ceramics were further etched with metal film as hard mask. In addition, femtosecond laser is used to ablation binary optical elements directly on the surface of transparent ceramics. In this paper, we use a variety of binary optical elements to carry out experiments, including one-dimensional grating, orthogonal grating, Darman grating, square band plate and Fresnel band plate. Binary hologram and vortex beam element realized by computer programming. The feasibility of using transparent ceramics to fabricate binary optical elements has been verified from many aspects. The experimental results were analyzed by optical profilometer and microscope, and the diffraction patterns of the sample elements were reconstructed.
【学位授予单位】：南昌航空大学
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：TQ174.758.23
【参考文献】
相关期刊论文 前1条
1 金国藩,谭峭峰;二元光学[J];光电子技术与信息;2001年05期
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