新型无铅压电陶瓷驱动器工艺与性能研究
发布时间：2018-11-28 12:23
【摘要】：压电材料作为一类重要的、国际竞争极为激烈的高新技术材料,以压电材料尤其是压电陶瓷制成的微位移器、驱动器和传感器,广泛用于航空航天等高新技术领域及民用生活中,是不可缺少的现代化关键材料和器件。现今广泛投入使用的压电陶瓷材料多是铅基材料,在生产、利用和报废处理过程中均会产生污染,给自然环境和人类健康带来巨大伤害。研究开发无铅基压电陶瓷器件取代含铅压电陶瓷器件是一项迫切,具有重大社会和经济价值的课题,但无铅压电陶瓷较含铅压电陶瓷,压电性能较弱,机械品质因数低,本文通过制备0.8Na0.5Bi0.5TiO3-0.2K0.5Bi0.5 TiO3(以下简称NKBT)无铅压电陶瓷,研究其极化工艺以提升其压电性能,制作NKBT基压电器件,对无铅压电陶瓷应用于驱动器做出了探索与研究。另外开发了适用于无铅器件的小型化驱动电路。首先使用固态反应法制备了NKBT陶瓷片,采用单因素方差与正交试验设计法,优化NKBT无铅压电陶瓷的极化工艺参数,结合不同条件下的极化工艺实验,获得了最佳极化工艺条件是6kv/mm,极化温度为70℃,极化时间为50min,保压时间21min,通过极化工艺参数的优化,使钛酸铋钠钾无铅压电材料的压电活性进一步提升,d33达到108pC/N。基于压电陶瓷叠层驱动器的驱动特性,采用有限元法结合钛酸铋钠钾无铅压电材料的物理特性,对新型压电陶瓷叠层驱动器的工作性能进行了模拟计算与仿真,重点研究驱动电压与微位移,输出力与微位移之间的关系,获得了其最大位移、输出力及响应频率特性参数。结果表明钛酸铋钠钾无铅压电材料适用于制作结构振动驱动元件的研发;为扩大该叠层驱动器应用范围,为其设计制作了菱形位移放大机构,测试显示外置放大机构的叠层驱动器驱动位移达到了25μm,分辨率达到0.17μm,在高精密定位领域有巨大发展潜力。使用有限元法建立环形超声电机数学模型,利用动力学分析优化超声电机关键部件参数,研究定子内外径对超声电机工作频率的影响,为研制超声电机样机奠定理论基础。通过建立驱动电路系统,主要是设计放大电路,实现对超声电机工作频率的控制。最后测试超声电机样机的转速,在无预应力下,转速为60r/min。
[Abstract]:Piezoelectric materials as an important and highly competitive high-tech materials, piezoelectric materials, especially piezoelectric ceramics made of micro-displacement devices, actuators and sensors, Widely used in high-tech fields such as aerospace and civil life, it is an indispensable modern key material and device. Nowadays, the piezoelectric ceramic materials widely used are lead-based materials, which will pollute in the process of production, utilization and waste treatment, and bring great harm to the natural environment and human health. The research and development of lead-free piezoelectric ceramic devices to replace lead-based piezoelectric ceramic devices is an urgent task with great social and economic value. However, lead-free piezoelectric ceramics have weaker piezoelectric properties and lower mechanical quality factors than lead-free piezoelectric ceramics. In this paper, 0.8Na0.5Bi0.5TiO3-0.2K0.5Bi0.5 TiO3 (hereinafter referred to as NKBT) lead-free piezoelectric ceramics are prepared, the polarization process is studied to improve their piezoelectric properties, and NKBT based piezoelectric devices are fabricated. The application of lead-free piezoelectric ceramics to actuators is explored and studied. In addition, a miniaturized drive circuit suitable for lead-free devices is developed. Firstly, NKBT ceramics were prepared by solid state reaction method. The polarization process parameters of NKBT lead-free piezoelectric ceramics were optimized by single factor variance and orthogonal design, and the polarization process experiments were carried out under different conditions. The optimum process conditions were obtained as follows: polarization temperature 70 鈩，
本文编号：2362806
[Abstract]:Piezoelectric materials as an important and highly competitive high-tech materials, piezoelectric materials, especially piezoelectric ceramics made of micro-displacement devices, actuators and sensors, Widely used in high-tech fields such as aerospace and civil life, it is an indispensable modern key material and device. Nowadays, the piezoelectric ceramic materials widely used are lead-based materials, which will pollute in the process of production, utilization and waste treatment, and bring great harm to the natural environment and human health. The research and development of lead-free piezoelectric ceramic devices to replace lead-based piezoelectric ceramic devices is an urgent task with great social and economic value. However, lead-free piezoelectric ceramics have weaker piezoelectric properties and lower mechanical quality factors than lead-free piezoelectric ceramics. In this paper, 0.8Na0.5Bi0.5TiO3-0.2K0.5Bi0.5 TiO3 (hereinafter referred to as NKBT) lead-free piezoelectric ceramics are prepared, the polarization process is studied to improve their piezoelectric properties, and NKBT based piezoelectric devices are fabricated. The application of lead-free piezoelectric ceramics to actuators is explored and studied. In addition, a miniaturized drive circuit suitable for lead-free devices is developed. Firstly, NKBT ceramics were prepared by solid state reaction method. The polarization process parameters of NKBT lead-free piezoelectric ceramics were optimized by single factor variance and orthogonal design, and the polarization process experiments were carried out under different conditions. The optimum process conditions were obtained as follows: polarization temperature 70 鈩，
本文编号：2362806
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