矩形受限下嵌段共聚物诱导自组装的理论研究

发布时间：2018-03-07 00:17

本文选题：嵌段共聚物　切入点：诱导自组装　出处：《宁夏大学》2017年硕士论文　论文类型：学位论文

【摘要】：摩尔定律指出,芯片上可容纳的元器件数目每两年就会翻一倍,这意味着集成电路对半导体制造工艺的要求不断提升。而半导体制造工艺中的刻蚀过程往往需要特定或长程有序结构的纳米模版,传统光刻技术由于物理极限问题已经难以满足低于10nm的尺寸要求。因此,研究者将目光转向了嵌段共聚物自组装技术。嵌段共聚物指由两种或两种以上均聚物嵌段通过共价键结合起来的高分子,可通过自组装形成周期性排列的纳米结构(5-100nm)。然而,作为典型的软物质,嵌段共聚物容易受到体系热涨落的影响,自组装形态往往含有大量缺陷,这限制了嵌段共聚物自组装结构的应用。因此,通过调控自组装过程抑制缺陷的产生或消除缺陷以形成大尺度有序纳米结构成为研究者关注的热点话题之一。通过引入受限环境或在基底引入特定分布的几何结构或化学图案以控制目标结构的取向,从而提高自组装结构有序程度的诱导自组装技术,是实现长程有序结构的最有效方法。本文利用含时金兹堡朗道理论系统地研究了矩形受限下AB两嵌段共聚物与均聚物C共混体系(AB/C)的异相成核过程。我们通过设计诱导条件得到了长程有序的六角柱状结构,克服了六角与矩形的角度不匹配问题,给出了实现有序结构的相关参数以及各参数的容忍度,同时,也对体系中缺陷的动力学行为进行了分析。第一章,我们介绍了嵌段共聚物诱导自组装的研究进展。第二章,我们简单介绍了嵌段共聚物的常用研究方法,详细给出了本文所用的含时金兹堡朗道(TDGL)理论的动力学演化方程,并介绍了结合元胞动力学(CDS)的计算模拟方法。第三章,我们利用TDGL理论系统地研究了 AB/C体系在矩形受限下的自组装动力学过程,在受限于矩形的共混体系中通过异相成核形成了长程有序结构。首先考察了正方形受限下两嵌段共聚物在各边相同外场的诱导下异相成核的过程,在不同的场强下,观察到了角诱导和边诱导的异相成核过程,发现了自组装结构均由于取向不匹配形成晶界缺陷,同时也提示我们在矩形受限条件下,两组对边的外场需有强度的差异才可能形成长程有序的六角结构。因此,我们设定x方向的两组对边场强大于另外两组对边场强,使水平方向外场作为主导诱导产生平行于x方向排列的六角柱,而竖直方向的外场只起到辅助作用。然后,我们详细考察了形成长程有序六角结构的外场条件。此外,我们还对矩形尺寸的容忍度进行了探讨,发现六角排列的柱状相对受限矩形的尺寸并不敏感,即尺寸的变化对体系的有序度影响极小。这一结果为实验中制备大尺度有序结构提供了一定的理论指导。第四章,我们简单介绍了嵌段共聚物自组装的层状相与六角柱状相中的常见缺陷。依据缺陷的动力学演化过程,我们将六角柱状结构中的五七缺陷对分为了两类:滑移型与攀移型。本章给出了每类缺陷的样本,并研究了不同类型缺陷之间的反应,研究结果为消除长程有序结构中的缺陷提供了新思路。
[Abstract]:Moore pointed out that the number of components on a chip can hold every two years will be doubled, which means that the requirements of integrated circuit of semiconductor manufacturing process of continuous improvement. And the etching process of semiconductor manufacturing process often requires specific or long-range ordered nanostructure templates, conventional lithography due to physical limits has been difficult to meet the problem of less than 10nm size requirements. Therefore, the researchers turned to the self-assembly of block copolymers. Block copolymer polymer composed of two or more than two kinds of homopolymer block by covalent bond together, can be formed through the self-assembly of nano structure of the periodic arrangement (5-100nm). However, as a typical soft matter the block copolymer is easily affected by system thermal fluctuations, the self-assembly morphology often contains a lot of defects, which limits the self-assembly of block copolymer structure application. Therefore, by Regulate the self-assembly process suppress the defect or eliminate the defects to form a large scale ordered nano structure has become one of the hot topic of researchers. By introducing the limited environment or geometric structure or chemical pattern into a specific distribution in the substrate to control the orientation of the target structure, thereby enhancing the self-assembly structure order degree induced self-assembly technique is the most effective method to achieve long-range ordered structure. The time-dependent Ginzburg Landau theory system of rectangular constrained AB two block copolymer and homopolymer C blends (AB/C) by using the heterogeneous nucleation process. We obtained six induction conditions through the design of columnar long-range ordered structure, overcomes six the rectangular angle and angle matching problem, given the realization of the relevant parameters of ordered structure and the parameters of tolerance, at the same time, also the dynamical behavior of system defects in For the analysis. In the first chapter, we introduce the research progress of block copolymer induced self-assembly. In the second chapter, we briefly introduce the research methods commonly used block copolymers, with the time-dependent Ginzburg Landau used this paper (TDGL) theory of dynamic evolution equation, and introduces the combination of cellular dynamics (CDS) simulation. In the third chapter, we use the self-assembly kinetics of TDGL theory to study AB/C system in rectangular constrained, in the blends are limited to rectangular through heterogeneous nucleation forming long-range ordered structure. First examines the square constrained two block copolymer in the process induced by each side of the same the field of heterogeneous nucleation, in different electric field intensity, observed angle of induction and edge induced nucleation process, self-assembly structures were formed due to the orientation does not match the boundary defects found at the same time. We suggest that in rectangular restricted conditions, two groups of the edge of the field to be formed between the strength of the long-range order of the six corner structure. Therefore, we set the X direction of the two groups of edge strength greater than the other two groups on the edge of the field intensity, so that the horizontal direction field six prism as the leading production line in X induced life the direction and the vertical direction of the field, only play a supporting role. Then, we studied the formation of outfield long-range ordered six corner structure. In addition, we are also on the size of the rectangle tolerance is discussed, that column six corner arrangement relatively limited rectangle size is not sensitive, that is minimal the size of the change order degree of system. This result provides some theoretical guidance in the experiment of preparation of large scale ordered structures. The fourth chapter, we introduce the layered and six columnar self-assembly of block copolymer phase. The common defects. According to defects of the dynamic evolution process, we will have 57 defects on six columnar structure in two types: sliding and climbing type. This chapter gives each kind of fault samples, and studied the reaction between different types of defects, this result provides a new approach to eliminate the defects of long Cheng Youxu in the structure.

【学位授予单位】：宁夏大学
【学位级别】：硕士
【学位授予年份】：2017
【分类号】：O631

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