泡生法蓝宝石单晶生长冷却水系统的水温控制

发布时间：2019-01-24 19:23

【摘要】：针对现有的蓝宝石单晶生长冷却水系统的水温控制精度不高、波动范围大和不稳定的问题,经过分析水温变化的滞后特性和炉内温度的变化,提出一套通过比例水阀连续调节由制冷变频机组和中间换热设备双回路混合后冷却水的温度控制方法。在Matlab/Simulink仿真环境中,仿真结果表明,参数自整定模糊PID控制器与常规PID相比具有不依赖系统模型、响应快、控制精度高的优点,且易于PLC控制器实现,使得水温有效的控制在(25±1)℃,适用于蓝宝石单晶生长冷却水系统的水温控制。
[Abstract]:Aiming at the problems of low control precision, large fluctuation range and unstable water temperature in the existing cooling water system of single crystal sapphire growth, the hysteresis characteristic of water temperature change and the variation of temperature in furnace are analyzed. This paper presents a method for controlling the temperature of cooling water continuously adjusted by proportional water valve after cooling water is mixed by refrigerating variable frequency unit and intermediate heat exchanger. In the Matlab/Simulink simulation environment, the simulation results show that the parameter self-tuning fuzzy PID controller has the advantages of independent system model, fast response, high control precision, and is easy to be implemented by PLC controller. The water temperature is effectively controlled at (25 卤1) 鈩，

本文编号：2414761