基于多层结构理论的三维纳米多孔阳极氧化铝实时扩孔机理研究（英文）

发布时间：2018-02-07 16:58

本文关键词： 多孔阳极氧化铝扩孔机理多层结构截面　出处：《稀有金属材料与工程》2017年06期 　论文类型：期刊论文

【摘要】：多孔阳极氧化铝(PAA)的孔径大小及其均匀性可通过扩孔进行改善。以3%(质量分数)磷酸作为刻蚀液,在实现PAA孔径扩大的同时,详细研究了三维状况下孔径形态的实时演变过程。发现PAA孔加宽在表面和截面2个方向上同时进行。在表面扩孔中,磷酸逐层蚀刻PAA内壁多层结构,随着扩孔时间的增加,扩孔速率不同。在截面扩孔中,当扩孔时间达到某一定值时,由于扩孔速率不同,PAA顶部的扩孔过程较底部相对较早完成,随后顶部扩孔速率逐渐降低,底部扩孔速率逐渐增加。当扩孔完成时,形成均一性良好的理想圆形小孔。同时发现,过度增加扩孔时间,PAA基元结构将被破坏,并由于高纵横比形成纳米线,随后被刻蚀溶液腐蚀。结合多层结构理论详细阐明了三维PAA的实时扩孔机制。
[Abstract]:The pore size and uniformity of porous anodic alumina (PAA) can be improved by pore expansion. Using 3 (mass fraction) phosphoric acid as etching solution, the pore size of PAA can be enlarged at the same time. The real time evolution of pore size morphology in three dimensional condition is studied in detail. It is found that PAA pore broadening is carried out simultaneously in both surface and cross section directions. In the surface reaming process, phosphoric acid etches the multilayer structure of PAA inner wall layer by layer, and with the increase of reaming time, When the reaming time reaches a certain value, the reaming process of the top of PAA is completed earlier than that of the bottom because of the different reaming rate, and then the rate of the expansion at the top decreases gradually. At the same time, it is found that the structure of PAA elements will be destroyed and nanowires will be formed because of the high aspect ratio. Then it was etched by etching solution, and the real time pore expansion mechanism of 3D PAA was explained in detail with the theory of multilayer structure.
【作者单位】：西北大学光电技术与功能材料国家重点实验室培育基地陕西省光电技术实验室国家级光电技术与纳米功能材料及应用国际科技合作基地;中国科学院物理研究所;
【基金】：National Natural Science Foundation of China(61378083) International Cooperation Foundation of the National Science and Technology Major Project of the Ministry of Science and Technology of China(2011DFA12220) Major Research Plan of National Natural Science Foundation of China(91123030) Natural Science Foundation of Shaanxi Province of China(14JS106)
【分类号】：TB383.4;TQ133.1

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