四丁基溴化铵辅助非水解溶胶-凝胶法制备硅酸锆薄膜

发布时间：2018-02-11 21:58

  本文关键词： 薄膜 硅酸锆 非水解溶胶-凝胶法 表面活性剂　出处：《中国陶瓷》2017年02期 　论文类型：期刊论文

【摘要】：采用非水解溶胶-凝胶法制备了硅酸锆薄膜,通过添加表面活性剂四丁基溴化铵(TBAB)提高了膜基结合力,获得了致密的硅酸锆薄膜。通过X射线衍射(XRD)分析了样品的晶体结构,采用场发射扫描电子显微镜(FESEM)对样品的形貌进行了表征。实验结果表明,603℃时硅酸锆相开始生成,850℃保温0.5 h可以获得纯相的致密硅酸锆薄膜。此外,添加TBAB不会影响非水解溶胶-凝胶过程中的异质聚合反应,同时还能将镀膜次数由2次增加至3次。使用该法制备的薄膜表面光滑致密,能够抵抗强碱液对硅基底的腐蚀。
[Abstract]:Zirconium silicate thin films were prepared by non-hydrolytic sol-gel method. By adding surfactant tetra#china_person0# ammonium bromide (TBA), a compact zirconium silicate thin film was obtained by increasing the adhesion of the film substrate. The crystal structure of the sample was analyzed by X-ray diffraction (XRD). The morphology of the samples was characterized by field emission scanning electron microscopy (FESEM). The experimental results show that the zirconium silicate phase can be formed at 603 鈩，

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