CVD法制备石墨烯的工艺表征及应用研究

发布时间：2018-02-12 18:48

本文关键词： 石墨烯拉曼光谱化学气相沉积法原子层沉积法 ZnO　出处：《华东理工大学》2015年硕士论文　论文类型：学位论文

【摘要】：石墨烯作为21世纪一种新型的纳米材料,由于其具有许多特殊的性质,包括室温下的反常量子效应、高电子迁移率、独特的抗热传导率和优异的机械性能等,致使石墨烯具有广泛应用空间,因此如何制备出高质量的石墨烯对其应用前景的研究是至关重要的。化学气相沉积法作为制备石墨烯的主流方法,对其制备工艺的充分理解对于制备出高质量的石墨烯是非常重要的。本文介绍了CVD法制备石墨烯的工艺流程,通过改变氢气和甲烷的浓度来分析比较了APCVD和LPCVD制备石墨烯的差异性,并通过表征图谱的分析总结出了制备高质量的、大面积的单层石墨烯的工艺条件。此外,通过实验研究,总结出了利用PMMA成功转移大面积、高质量石墨烯的工艺流程,并对转移好的石墨烯进行表面功能化处理。通过实验研究发现,利用原子层沉积法(ALD)在经臭氧照射处理过的石墨烯的表面沉积有0.5nm的Zn0时,对甲醛气体的敏感性有很大的提高。对于9ppm的甲醛气体电阻变化率可达50%以上,其响应时间也有明显的下降,而且可测试的最低浓度可达到180ppb。表明石墨烯经过表面功能化后,对某些气体将变得更敏感。希望通过本文的研究分析,为高质量的单层石墨烯的制备以及在气敏传感性能方面的研究奠定一定的基础。
[Abstract]:In 21th century, graphene was a new nanometer material, because of its many special properties, including abnormal quantum effect at room temperature, high electron mobility, unique heat resistance and excellent mechanical properties, etc. Therefore, it is very important to study how to prepare high quality graphene. Chemical vapor deposition (CVD) is the main method to prepare graphene. It is very important to understand the preparation process of graphene with high quality. In this paper, the process of preparing graphene by CVD method is introduced. The differences between APCVD and LPCVD in the preparation of graphene were analyzed by changing the concentration of hydrogen and methane, and the process conditions of preparing high quality and large area graphene monolayers were summarized by the analysis of characterization spectra. In addition, the technological process of successfully transferring large area and high quality graphene using PMMA was summarized through experimental research, and the surface functionalization of transferred graphene was carried out. When the surface of graphene treated by ozone is deposited with 0.5 nm Zn0, the sensitivity to formaldehyde gas is greatly improved by atomic layer deposition method. The change rate of resistance of 9ppm formaldehyde gas can reach more than 50%. The response time has also decreased obviously, and the lowest detectable concentration can reach 180 ppb. it shows that graphene will become more sensitive to some gases after surface functionalization. It lays a foundation for the preparation of high quality graphene monolayers and the study of gas sensing properties.
【学位授予单位】：华东理工大学
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：TB383.1;TQ127.11

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