W、Mo离子注入对离子镀TiN薄膜表面结构和性能的影响

发布时间：2018-02-22 18:33

本文关键词： 离子注入氮化钛摩擦磨损钨离子钼离子　出处：《表面技术》2017年06期 　论文类型：期刊论文

【摘要】：目的进一步改善氮化钛薄膜的摩擦学性能。方法利用金属蒸汽真空弧源(MEVVA)在离子镀TiN薄膜表面进行等剂量W、Mo离子注入。采用扫描俄歇系统、光学三维形貌仪、X射线衍射仪和纳米压痕仪,分别分析了TiN薄膜的离子注入深度、表面形貌及粗糙度、相结构和不同压入深度的薄膜硬度。在球盘滑动摩擦磨损试验机上考察了TiN薄膜的摩擦学性能,并利用扫描电子显微镜和三维形貌仪对其磨损形貌进行分析。结果等剂量离子注入后,TiN表面注入层中W离子的含量明显大于Mo离子,两种离子注入对TiN薄膜的表面形貌和硬度的影响较小。XRD结果表明,W离子和Mo离子注入后均发现了Ti_2N硬质相。两种离子注入均可以不同程度地降低TiN薄膜的摩擦系数和磨损率。结论 W、Mo离子注入均可显著改善TiN薄膜的摩擦学性能,但Mo离子更有利于其摩擦系数的降低,而W离子注入更有利于TiN薄膜磨损率的降低。
[Abstract]:Aim to further improve the tribological properties of titanium nitride thin films. Methods Metallic vapor vacuum arc source (MEVVA) was used to implanted TiN films with equal doses of Wimo ions. Scanning Auger system was used to study the tribological properties of titanium nitride films. The depth of ion implantation, surface morphology and roughness of TiN films were analyzed by X-ray diffractometer and nano-indentation instrument. The tribological properties of TiN films were investigated on a ball disk sliding friction and wear tester with different indentation depth and phase structure. The wear morphology of tin was analyzed by scanning electron microscope (SEM) and three-dimensional topography. Results the W ion content of tin implanted layer was obviously higher than that of Mo ion after iso-dose ion implantation. The effect of two kinds of ion implantation on the surface morphology and hardness of TiN thin films is small. The results show that both W and Mo ions have found Ti_2N hard phase after implantation. Both of them can reduce the friction system of TiN thin films to some extent. Conclusion the tribological properties of TiN films can be significantly improved by Wimo ion implantation. But Mo ion is more favorable to the decrease of friction coefficient, and W ion implantation is more favorable to decrease the wear rate of TiN film.
【作者单位】：北京工商大学材料与机械工程学院;中国地质大学(北京)工程技术学院;
【基金】：国家自然科学基金面上项目(41572362) 北京市教育委员会科技计划一般项目(SQKM201710011002) 中央高校基本科研业务费优秀教师研究项目(2652015077) 高等学校博士学科点专项基金资助课题(20130022110004)~~
【分类号】：TB383.2;TQ134.11

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