微晶玻璃工件的保形酸蚀工艺研究

发布时间：2018-03-04 12:22

本文选题：微晶玻璃　切入点：氢氟酸　出处：《苏州大学》2015年硕士论文　论文类型：学位论文

【摘要】：氢氟酸酸蚀是传统的用于去除玻璃反射镜体机加工艺轻量化后残余应力的一种有效方法,由于传统对于反射镜体及其轻量化孔的形位公差要求都不高,因此对酸蚀工艺一直未见详细研究。对于可用于深空科学探测和反导预警等国防安全事业的全低温光学系统,其反射镜结构一体件和结构件形位公差都有较高要求,且大部分的形位公差只能靠机加工艺保证,这就要求酸蚀过程中基本不能改变微晶玻璃结构件的形位公差,因此对于酸蚀过程中各工艺参数的影响以及保形酸蚀工艺条件进行研究具有很重要的价值。本文以酸蚀机理为基础,结合实验,证明了氢氟酸酸蚀对于微晶玻璃表面存在的裂纹,划痕和微裂纹的影响,酸蚀有利于微晶玻璃释放残余应力。同时,通过实验分析了酸蚀工艺参数对于酸蚀的影响并提出一些优化方法。最后,解决实际酸蚀过程中氢氟酸酸蚀大体积实验件上下去除量不一致的问题并且结合之前实验得出的工艺条件实现了可用于全低温光学系统的微晶玻璃结构件酸蚀前后的形位公差不变即保形。
[Abstract]:Hydrofluoric acid etching is an effective method for removing residual stress of glass reflector after light weight machining. Because of the traditional requirements for the shape and position tolerance of the mirror and its lightweight holes are not high. Therefore, the acid etching process has not been studied in detail. For the all-low temperature optical system, which can be used for deep space scientific exploration and antimissile warning, the reflector structure and the configuration tolerance of the structure are all required. And most of the tolerance of shape and position can only be guaranteed by machining, which requires that the tolerance of glass-ceramics structure can not be changed in the process of acid etching. Therefore, it is of great value to study the influence of various technological parameters and the condition of conformal acid etching in the process of acid etching. In this paper, based on the mechanism of acid etching, combined with experiments, It is proved that the effect of hydrofluoric acid etching on the cracks, scratches and microcracks on the surface of glass-ceramics is beneficial to the release of residual stress from glass-ceramics. The influence of process parameters on acid etching is analyzed experimentally and some optimization methods are put forward. In order to solve the problem of high and low removal amount of hydrofluoric acid etching large volume experimental parts in the process of actual acid etching, and combined with the process conditions obtained from previous experiments, the glass ceramics structure can be used in the whole low temperature optical system before acid etching. The shape and position tolerance after the change is conformal.
【学位授予单位】：苏州大学
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：TQ171.733

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