飞秒激光加工石英玻璃微结构实验与仿真研究

发布时间：2018-03-06 23:17

本文选题：飞秒激光　切入点：石英玻璃　出处：《大连理工大学》2015年硕士论文　论文类型：学位论文

【摘要】：石英玻璃具有机械强度高、耐热性好、热膨胀系数小、化学性能稳定等优点,因而广泛应用于光刻印刷、空间光学及激光核聚变系统等领域。这些领域,较多涉及石英玻璃微结构的精密加工,如表面微流道制造、表面凹槽减薄等。但石英玻璃具有高硬易碎等特点,传统加工方法如光刻腐蚀、超声波和离子刻蚀等很难在其表面进行点线面等微结构的精密加工。飞秒激光脉宽短于绝大多数物理化学过程的特征时间,因此具有阈值效应明显、热影响区极小、重铸层小和可控性高等特点,使其在石英玻璃表面进行微结构的精密加工成为可能。本文采用实验与仿真相结合的方法,对飞秒激光精密加工石英玻璃微结构的形状和形貌特征进行分析与讨论,主要研究内容包括：(1)分析飞秒激光加工电介质过程中所涉及的非线性过程,基于福克-普朗克方程,建立飞秒激光烧蚀石英玻璃的烧蚀阈值及单脉冲烧蚀深度模型,为微结构加工实验提供脉冲能量参考,为微结构仿真模型的建立提供理论基础；(2)开展微孔结构烧蚀实验,分析脉冲能量和数目对微孔烧蚀形状及形貌影响规律；测量烧蚀阈值、单脉冲烧蚀深度及多脉冲累积系数等参数,对阈值模型进行验证,并为飞秒激光加工石英玻璃微结构仿真模型的建立提供基本参数；(3)开展线槽结构加工实验,分析脉冲能量和扫描速度对线槽加工形状及形貌影响规律,确定优化的线槽加工参数；基于单脉冲烧蚀深度模型,建立线槽结构截面形状仿真模型,为后续凹槽仿真建立基础；(4)开展单层凹槽减薄实验,分析线重叠率对凹槽减薄形状及底面形貌影响规律；建立单层凹槽减薄三维仿真模型,通过模型分析脉冲能量和扫描速度参数对凹槽底面粗糙度影响规律；(5)开展不同减薄方式的双层凹槽减薄实验,与单层减薄凹槽进行对比,分析减薄方式对石英玻璃凹槽形状及形貌的影响规律。
[Abstract]:Quartz glass has high mechanical strength, good heat resistance, low thermal expansion coefficient, chemical stability and other advantages, is widely used in the field of space optical lithography, and laser fusion systems. These areas are more involved in precision machining of quartz glass micro structure, such as surface micro channel fabrication, surface groove thinning. But the quartz glass has high hard brittle characteristics, traditional processing methods such as photoetching, ultrasonic and ion etching on the surface of hard point such as precision machining of micro structure. The characteristics of femtosecond laser pulse width time shorter than the vast majority of the physical and chemical process, so it has obvious threshold effect, minimal heat affected Zone, recasting small and controllable high, the precision machining of micro structure on the surface of quartz glass becomes possible. This paper uses the method of combining experiment and simulation, the femtosecond laser precision machining The characteristics of the shape and morphology of quartz glass micro structure were analyzed and discussed, the main research contents include: (1) the nonlinear analysis of the processes involved in the process of femtosecond laser processing of dielectric, the Fokker Planck equation based on the ablation threshold of quartz glass based femtosecond laser ablation and single pulse ablation depth model, provide reference for micro energy pulse the structure of machining experiments for micro structure simulation model provides a theoretical basis; (2) to carry out the microporous structure of Ablation Experiment Analysis of pulse energy and number of micro ablation of shape and morphology influence; measurement of ablation threshold, single pulse ablation depth and multi pulse accumulation coefficient, to verify the threshold model, and for femtosecond laser the processing of quartz glass micro structure to establish simulation model to provide the basic parameters; (3) to carry out the line groove machining experiment, analysis of pulse energy and scanning speed on line Influence of groove shape and morphology, determine the processing parameters optimization of line groove; single pulse ablation depth model based on a line groove structure shape simulation model, establish the foundation for the subsequent simulation of groove; (4) to carry out single groove thinning experiments, analysis of line overlap rate on the groove shape and the bottom thinning effect of surface topography the establishment of single groove thinning; 3D simulation model, through the analysis of the model of pulse energy and scanning velocity parameters of roughness of the groove bottom surface; (5) to carry out the double groove of different thinning methods thinning experiments, compared with monolayer thin grooves, influences of thinning methods on the quartz glass groove shape and morphology.

【学位授予单位】：大连理工大学
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：TQ171.731;TN249

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