四甲基硅流量对SiC空心微球成分及性能的影响

发布时间：2018-03-11 03:07

本文选题：碳化硅　切入点：空心微球　出处：《硅酸盐学报》2017年10期 　论文类型：期刊论文

【摘要】：以四甲基硅(tetramethyl silane,TMS)、反式二丁烯(trans-2-butene,T2B)和氢气为工作气源,采用化学气相沉积(CVD)-高温热解法,在不同TMS流量条件下制备了惯性约束聚变用SiC空心微球。对SiC空心微球的成分、表面形貌、表面粗糙度、球形度以及壁厚均匀性等进行了表征,分析了不同TMS流量对SiC空心微球成分及性能的影响。研究表明:在SiC空心微球中,C与Si两元素的原子比随TMS流量增加呈现逐渐减小的趋势。微球的表面均方根粗糙度随TMS流量的增加先减小后增加,当TMS流量为0.25 m L/min时,表面均方根粗糙度减小至78 nm。微球的球形度随TMS流量的增加不发生明显变化,且均优于99%,而壁厚均匀性随TMS流量的增加先增加后减小,当TMS流量为0.25 m L/min时,壁厚均匀性可达96%。
[Abstract]:With four methyl silicone (tetramethyl silane, TMS), trans two butene (trans-2-butene, T2B) and hydrogen as the work gas, by chemical vapor deposition (CVD) - pyrolysis method, TMS in different flow conditions were prepared for inertial confinement fusion using SiC hollow microspheres. The composition of SiC hollow microspheres, surface the morphology, surface roughness, sphericity and wall thickness uniformity were characterized, and analyzes the influence of different TMS flow on the composition and properties of SiC hollow microspheres. The results show that: in the SiC hollow microspheres, C and Si two element atom ratio with the increase of TMS flow rate decreases gradually. The surface of the microspheres were the RMS roughness increases with the flow rate of TMS decreases first and then increases, when the flow rate of TMS is 0.25 m L/min, the rms surface roughness is reduced to 78 nm. microspheres with spherical degree TMS the increase of flow rate does not change significantly, and better than 99%, and the wall thickness uniformity with TMS flow The increase of the volume increases first and then decreases. When the TMS flow is 0.25 m L/min, the wall thickness uniformity can reach 96%.

【作者单位】：中国工程物理研究院激光聚变研究中心;西南科技大学材料科学与工程学院;
【基金】：中国工程物理研究院超精密加工重点实验室基金项目(ZD16002)
【分类号】：TQ127.2

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