激光改性辅助腐蚀加工玻璃微结构研究

发布时间：2018-03-16 19:27

本文选题：微流体系统　切入点：飞秒激光　出处：《应用激光》2017年04期 　论文类型：期刊论文

【摘要】：传统的半导体工艺制作微流体系统中微通道,只能对材料进行表面加工。飞秒激光具有极高的峰值功率和超短的脉冲持续时间,能够对材料直接进行三维加工,为高效率、高质量的微通道加工提供了可能。通过研究飞秒激光加工参数,包括激光脉冲能量、扫描速度和偏振态对玻璃微通道的选择性腐蚀比影响规律,发现当激光脉冲能量在2~10μJ变化时,微通道宽度变大,2μJ时微通道长宽选择性腐蚀比L/D高于其它脉冲能量参数,但随着腐蚀时间的延长,宽度变化越来越小,最后趋于稳定;当激光扫描速度在0.20~0.45mm/s之间变化时,随着腐蚀时间的延长微通道长宽选择性腐蚀比L/D逐渐增大,但当速度增加到0.35mm/s左右时选择性腐蚀比L/D增到最大,此后呈现下降趋势,同样随着腐蚀时间的延长,腐蚀通道的宽度变化越来越小,逐渐趋于平稳;当偏振态从线偏振到圆偏振变化时,线偏振时的微通道长宽选择性腐蚀比L/D更大。实验结果表明:获得较大微通道长宽选择性腐蚀比L/D的最优加工参数为激光脉冲能量2μJ,激光扫描速度0.35mm/s,线偏振。
[Abstract]:In the traditional semiconductor process, the microchannel can only be processed on the surface of the material. The femtosecond laser has extremely high peak power and ultrashort pulse duration, and can directly process the material in three dimensions, which is highly efficient. By studying the effects of femtosecond laser processing parameters, including laser pulse energy, scanning speed and polarization state, on the selective corrosion ratio of glass microchannels, It is found that when the laser pulse energy varies from 2 渭 J to 10 渭 J, the selective corrosion ratio of L / D is higher than that of other pulse energy parameters when the width of the microchannel becomes larger than that of the other pulse energy parameters. However, with the increase of the etching time, the variation of the width becomes smaller and more stable. When the laser scanning speed varied from 0.20 to 0.45 mm / s, the selective etching of microchannel length and width gradually increased with the increase of etching time, but the selective corrosion rate increased to the maximum when the laser speed increased to 0.35 mm / s or so, and then showed a downward trend. With the increase of corrosion time, the width of the corrosion channel becomes smaller and more stable, and the polarization state changes from linear polarization to circular polarization. The experimental results show that the optimum processing parameters of the larger microchannel length and width corrosion ratio are laser pulse energy 2 渭 J, scanning speed 0.35 mm / s, and linear polarization, and the experimental results show that the optimum processing parameters are: laser pulse energy 2 渭 J, scanning speed 0.35 mm / s, and linear polarization.
【作者单位】：中南大学机电工程学院高性能复杂制造国家重点实验室;
【基金】：国家自然科学基金资助项目(项目编号:51475481,51475482,51335011,91323301) 中南大学中央高校基本科研业务费专项资金资助项目
【分类号】：TQ171.6

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