MPCVD技术合成工具级单晶金刚石的研究

发布时间：2018-03-17 17:50

本文选题：MPCVD　切入点：单晶金刚石　出处：《武汉工程大学》2015年硕士论文　论文类型：学位论文

【摘要】：单晶金刚石拥有高硬度、高弹性模量、高热导率、高耐磨耐腐蚀性等优异性质,是一种制备加工工具的理想材料,尤其是在精密/超精密加工领域,单晶金刚石更是有着独特的优势。微波等离子体化学气相沉积(Microwave Plasma Chemical Vapor Deposition,MPCVD)技术被认为是目前生长高质量单晶金刚石的最佳选择之一,在国外已有多家使用该技术进行批量生产单晶金刚石的企业。相比之下,国内受到设备和工艺的双重困难,对CVD单晶金刚石的研究仍多数停留在实验室研究阶段,使得生长速率和生长质量难以达到工业化生产的要求。本研究利用国产的5kW MPCVD设备进行了单晶金刚石生长工艺的研究,主要研究内容如下:1.在CH_4/H_2气氛中研究了甲烷浓度、沉积温度、生长气压等因素对单晶金刚石生长速率和生长质量的影响。2.分别研究了在CH_4/H_2气氛中添加N_2,O_2,Ar对单晶金刚石生长的影响。3.在1.和2.的研究基础上,进行了大颗粒CVD单晶金刚石的生长。采用拉曼光谱仪、X射线衍射和光吸收光谱等手段对单晶金刚石的成分、结构、结晶质量等方面进行表征。高性能实验装置是合成高质量单晶金刚石的保障,但是工艺条件的优化也同样重要。研究所用的MPCVD装置虽然在性能上不如国外先进装置,但是经过对工艺参数的研究和优化,使用尺寸为7.0×7.0×0.3 mm~3的工具级CVD单晶金刚石作为籽晶,以较快速率(56μm/h)生长得到尺寸为8.3×8.3×2.0 mm~3的大单晶金刚石,产品质量与籽晶的质量相当。
[Abstract]:Single crystal diamond with excellent properties such as high hardness, high modulus of elasticity, high thermal conductivity, high wear resistance and corrosion resistance is an ideal material for manufacturing tools, especially in the field of precision / ultra-precision machining. Microwave plasma chemical vapor deposition (MPCVD) technique is considered to be one of the best choice for the growth of high quality monocrystalline diamond. There are many enterprises abroad that use this technology to produce monocrystalline diamond in bulk. In contrast, the research on CVD single crystal diamond is still in the laboratory stage, because of the double difficulties of equipment and technology in our country. The growth rate and quality of monocrystalline diamond are difficult to meet the requirements of industrial production. In this study, the growth process of single crystal diamond was studied by using a domestic 5 kW MPCVD equipment. The main contents of the study were as follows: 1. The concentration of methane in CH_4/H_2 atmosphere was studied. Effects of deposition temperature, growth pressure and other factors on growth rate and quality of single crystal diamond. (2) the effect of adding N _ 2O _ 2A _ r into CH_4/H_2 atmosphere on growth of single crystal diamond was studied. The growth of large grain CVD single crystal diamond was carried out. The composition and structure of single crystal diamond were studied by means of Raman spectrometer X-ray diffraction and optical absorption spectrum. The high performance experimental device is the guarantee for the synthesis of high quality single crystal diamond, but the optimization of the process conditions is also important. Although the MPCVD device used in the research is inferior to the advanced equipment abroad in performance, However, through the study and optimization of the process parameters, using the tool grade CVD single crystal diamond with the size of 7.0 脳 7.0 脳 0.3 mm~3 as seed crystal, and growing at a faster rate of 56 渭 m / h, the large single crystal diamond with the size of 8.3 脳 8.3 脳 2.0 mm~3 was obtained, and the quality of the product was equal to that of the seed crystal.
【学位授予单位】：武汉工程大学
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：TQ163

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