钙硼硅系高膨胀陶瓷复合材料的制备及性能研究

发布时间：2018-03-19 23:00

  本文选题：玻璃陶瓷　切入点：CBGA　出处：《电子科技大学》2017年硕士论文　论文类型：学位论文

【摘要】：在高速发展的微电子技术推动下,电子系统正朝着超大规模化、高度集成化、多功能微型化方向发展,而在电子产品中最重要的部件是芯片。在芯片二级封装中,使用了多层陶瓷基板球栅阵列封装技术(CBGA),为了防止基板与印刷电路板(PCB)的热膨胀系数(CTE)不匹配而导致焊点失效,损坏芯片,则需要研究高热膨胀系数的低温共烧(LTCC)基板材料。在成熟的钡硼硅玻璃陶瓷体系中,仍存在热膨胀系数曲线线性度差的问题。经查阅文献,发现钙硼硅玻璃具有高线性度的热膨胀系数曲线,于是用CaO部分取代BaO来研究钡硼硅玻璃陶瓷的性能,结果显示,材料体系的CTE值曲线的线性度变好。在此基础上,研究CaO完全取代BaO后新体系钙硼硅玻璃陶瓷的性能,这是一种钙硼硅系玻璃加石英砂的材料,在950℃下采用传统固相法烧结。通过对不同配方组成进行实验,研究该材料体系晶相含量、抗弯强度、热膨胀系数、介电性能和微观性能等方面的性能,发现主晶相为石英相与硅灰石,CaO含量的增加抑制了方石英相析出,α-方石英与β-方石英间会引起体积变化的相转变减少,从而获得比之前更高线性度的CTE值曲线。硅灰石作为新晶相,当为三斜晶系的针状结构时,能够极大地提升玻璃陶瓷抗弯强度,但由于该晶相的CTE值较小,约为6.5ppm/℃,会导致样品总的CTE值减小。当CaO含量为40wt%时,钙硼硅玻璃陶瓷可获得高机械强度222.5MPa,CTE值达到9.39ppm/℃,且具备高线性度的CTE值曲线及优良介电性能;在石英砂含量为35wt%时,热膨胀系数提高至11.8 ppm/℃,并具备一定的抗弯强度150MPa,能够满足CBGA封装的要求。同时也发现过量的CaO或Si02都会恶化玻璃陶瓷的微观结构,降低性能。最后对钙硼硅玻璃陶瓷进行了析晶动力学、烧结动力学及热膨胀系数理论计算的深入研究,采用Kissinger法计算样品析晶活化能E,Ozawa法计算析晶指数n,发现过量CaO使能量势垒提高,样品从表面结晶变为体析晶;烧结激活能的计算结果显示,CaO增加会抑制石英及方石英析出,石英和方石英之间、方石英不同晶型间的转化都会变少,激活能降低,使得烧结收缩难度变低;通过对比氧化物法和晶相法计算热膨胀系数的理论值与实际值差距,发现晶相是影响该材料体系CTE大小的关键,氧化物法计算误差较大,晶相法可用于今后对新玻璃陶瓷体系的配方设计和性能预测。
[Abstract]:Driven by the rapid development of microelectronics technology, electronic systems are developing towards super-large scale, highly integrated and multifunctional miniaturization. The most important component in electronic products is chip. In order to prevent the thermal expansion coefficient (CTE) mismatch between the substrate and the printed circuit board (PCB), the multilayer ceramic substrate ball grid array packaging technology is used to prevent the failure of the solder joint and the damage to the chip, in order to prevent the mismatch of the thermal expansion coefficient of the substrate and the printed circuit board (PCB). It is necessary to study the low temperature co-fired LTCC substrate material with high thermal expansion coefficient. In the mature barium borosilicate glass ceramic system, there is still the problem of poor linearity of the thermal expansion coefficient curve. The thermal expansion coefficient curve of Calcium-Borosilicate glass is found to be of high linearity, so the properties of barium borosilicate glass ceramics are studied by replacing BaO with CaO. The results show that the linearity of CTE value curve of the material system becomes better. The properties of a new system of calcium borosilicate glass ceramics after replacing BaO completely by CaO were studied. It is a kind of material of calcium boron silicon system glass and quartz sand, sintered by traditional solid state method at 950 鈩，

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