钴掺杂硅溶胶的制备及其在A向蓝宝石抛光中的应用（英文）

发布时间：2018-04-02 09:48

本文选题：非球形硅溶胶　切入点：钴　出处：《表面技术》2017年08期

【摘要】：目的提高A向蓝宝石抛光速率。方法分别采用诱导法和种子法制备了非球形和球形钴掺杂硅溶胶,并应用于A向蓝宝石的化学机械抛光。采用扫描电子显微镜(SEM)、电感偶合等离子体发射光谱仪(ICP)和X射线光电子能谱(XPS)检测产物颗粒的粒径及其分布、形貌、元素组成及存在状态等,采用CP-4抛光机对抛光速率进行验证,并用原子力显微镜测试抛光后的材料表面粗糙度,根据抛光后产物的XPS测试结果对抛光过程中的化学反应进行分析。结果与纯硅溶胶相比,非球形钴掺杂硅溶胶抛光速率提高了37%,且表面粗糙度相近,而球形钴掺杂硅溶胶抛光速率却无明显优势。XPS结果显示,目前没有证据表明Co元素参与了化学反应。结论非球形钴掺杂硅溶胶在A向蓝宝石抛光中起到了积极作用,归因于其形状优势而非Al_2O_3与Co之间的化学反应。
[Abstract]:Objective to improve the polishing rate of A direction sapphire.Methods Non-spherical and spherical cobalt-doped silica sol was prepared by induction method and seed method, and was applied to the chemical and mechanical polishing of A direction sapphire.Scanning electron microscopy (SEM), inductively coupled plasma emission spectrometer (ICP) and X-ray photoelectron spectroscopy (XPS) were used to detect the particle size and distribution, morphology, element composition and existing state of the product.The polishing rate was verified by CP-4 polishing machine, and the surface roughness of the polished material was measured by atomic force microscope. The chemical reaction in the polishing process was analyzed according to the XPS test results of the polished products.Results compared with pure silica sol, the polishing rate of non-spherical cobalt doped silica sol increased 37%, and the surface roughness was similar, while the polishing rate of spherical cobalt doped silica sol had no obvious advantage. XPS results showed that the polishing rate of spherical cobalt doped silica sol was similar to that of spherical cobalt doped silica sol.There is no evidence that Co is involved in the chemical reaction.Conclusion Non-spherical cobalt-doped silica sol plays an active role in A-direction sapphire polishing due to its dominant shape rather than the chemical reaction between Al_2O_3 and Co.
【作者单位】：上海大学理学院;中国科学院上海微系统与信息技术研究所;上海大学纳米科学与技术研究中心;
【基金】：Supported by National Natural Science Foundation of China(51205387) Science and Technology Commission of Shanghai(14XD1425300,14DZ2294900)~~
【分类号】：TB306;TQ127.2

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