PZT基叠层压电陶瓷制备及界面优化

发布时间：2018-04-17 01:40

  本文选题：PZT基叠层压电陶瓷 + 低温共烧(LTCC)　； 参考：《南京航空航天大学》2017年硕士论文

【摘要】：压电作动器具有控制精度高、响应速度快、线性度好、功耗低等优点,已被广泛应用于电子、通信、医学等诸多领域。与此同时,随着科学的发展,单层压电作动器驱动电压高、位移太小,已经没法满足当前低电压下大位移的需要。为了克服这一缺点,叠层压电作动器受到了越来越多的关注。本文主要对制备叠层陶瓷压电作动器过程中的流延工艺和叠层、热压、埋压烧结工艺进行了系统的研究,成功的探索出了良好的制备工艺。还尝试着采用对内电极银浆进行掺杂陶瓷粉的方式,对叠层陶瓷器件层间的界面缺陷进行了优化,也取得了较好的实验结果。系统地摸索了整个制备叠层陶瓷器件的工艺,重点对流延工艺和埋压烧结工艺进行了相应的优化。结果表明:当添加0.9%wt分散剂、4.3%wt粘结剂、2.5%wt增塑剂,且当所使用的溶剂丁酮和无水乙醇的体积比为7:3时,所制备的流延浆料符合使用要求;当流延机加热基板温度设置为38℃左右,流延速度为0.21m/min-0.22m/min,流延机刀口间隙为180μm时,可以流延出表面无明显缺陷,厚度为50μm左右,综合性能良好的流延生片;当叠层器件层数低于20层,每平方毫米负重0.1875克左右,可以很好地起到抑制Z轴方向的变形且可以不导致叠层器件开裂的现象,而在器件的四周堆积大量的预烧陶瓷粉,可以很好地起到抑制X-Y方向的侧弯变形。随后,对成功烧结制备的叠层试样进行了性能检测,结果表明:烧结致密的叠层压电陶瓷作动器层与层之间界面清晰,有很少的孔洞和间隙等缺陷,压电层和内电极层的厚度分别为35μm和5μm。同时,通过向内电极银浆中添加不同比例的陶瓷粉,研究不同的添加量对叠层陶瓷的界面改善情况。实验结果表明:当内电极银浆的陶瓷粉掺杂量达到30%-40%时,此时叠层器件的抗拉强度提高了约1.8-1.9倍。但是内电极的方阻也由未掺杂陶瓷粉的2mΩ/mm增大到掺杂了40%时的40mΩ/mm;当掺杂量达到50%左右时,内电极开始出现不连续的状况,基本失去了连续导电性,此时的叠层器件已经无法投入使用。最后,还对不同陶瓷粉添加量的试样进行了疲劳测试,测试结果表明:随着陶瓷粉的添加量的逐渐增大,εr和d33逐渐降低,漏电流逐渐增大。这种实验结果与叠层陶瓷作动器的电极连接模型吻合度较好。
[Abstract]:Piezoelectric actuators have been widely used in many fields, such as electronics, communication, medicine and so on, because of the advantages of high control precision, fast response, good linearity and low power consumption.At the same time, with the development of science, the single-layer piezoelectric actuators drive voltage is high, the displacement is too small to meet the needs of large displacement at low voltage.In order to overcome this shortcoming, laminated piezoelectric actuators have attracted more and more attention.In this paper, the rolling process, lamination, hot pressing and burying sintering process of laminated ceramic piezoelectric actuators are studied systematically, and a good preparation process has been successfully explored.The interface defects between laminated ceramic devices were optimized by doping ceramic powder with internal electrode silver paste, and good experimental results were obtained.The process of fabricating laminated ceramic devices is studied systematically. The key process of convection casting and burying sintering are optimized.The results show that when the addition of 0.9%wt dispersant 4.3wt binder and 2.5wt plasticizer, and when the volume ratio of solvent butanone and anhydrous ethanol is 7:3, the casting slurry meets the requirements of application, and when the heating temperature of the casting machine is about 38 鈩，

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