耐高压铝电解电容器阳极箔制备工艺研究
发布时间:2018-04-18 22:41
本文选题:超高压 + 铝电解电容器 ; 参考:《广西科技大学》2015年硕士论文
【摘要】:铝电解电容器在集成电路中是一种难于集成的电子元件,高比容化一直是其研究方向。近年来,超高压铝电解电容器的需求变的越来越迫切,超高压阳极箔是制备超高压铝电解电容器的关键材料,决定着铝电解电容器的比容等各项电性能。本文以比容为评价指标,研究了腐蚀条件和缓蚀剂的使用对超高压(700Vfe)铝电解电容器用阳极箔比容的影响规律,尝试了制备高介电常数复合氧化膜,研究了其对提高超高压阳极箔比容的影响规律。采用正交法研究了发孔温度、电流密度、时间、Al3+浓度对超高压铝电解电容器用阳极箔比容的影响。正交实验结果显示,发孔温度对超高压阳极箔比容的影响最大,电流密度和发孔时间影响次之,Al3+浓度的影响最小。研究了发孔工艺条件对超高压阳极箔比容和耐压值的影响,Vfe=700V阳极箔的发孔最优工艺参数为:[Cl-]/[SO42-]=1 mol/L/3 mol/L和0.2mol/LAl3+组成的混合溶液中,75℃,0.40 A/cm2电流密度条件下发孔120s。在最优发孔工艺条件下,研究了扩孔工艺条件对超高压阳极箔比容的影响,发现在1mol/L HNO3溶液中,75℃,0.1A/cm2条件下扩孔500s。所得腐蚀箔经700V二级化成,耐压值为668V,比容值达到0.48μF/cm2。研究了缓蚀剂十六烷基三甲基溴化铵、乙二胺四乙酸二钠、聚乙二醇4000对超高压阳极箔比容的影响,结果表明,三种缓蚀剂均能有效地提高超高压阳极箔的比容,但量应控制在合适的范围内,三种缓蚀剂的最优值为:十六烷基三甲基溴化铵为3 g/L,乙二胺四乙酸二钠为2.5 g/L,聚乙二醇4000为1.25g/L。尝试了通过溶胶凝胶法制备Al2O3-CaCu3Ti4O12复合氧化膜,采用提拉法研究了浸渍次数和浸渍时间对超高压阳极箔比容和耐压的影响规律,随浸渍次数的增加,比容逐渐升高,但耐压值逐渐降低;溶胶浸入腐蚀箔隧道孔需要一定的时间,充满隧道孔后随浸渍时间的延长附着量也不会再增加,浸渍时间过短比容提高有限,过长比容也不会继续提高,研究发现,时间应控制在40s为宜。尝试了通过阳极电沉积法制备Al2O3-CaCu3Ti4O12复合氧化膜对超高压阳极箔比容和耐压的影响,发现沉积时间的长短影响沉积量的多少,随沉积时间的延长,沉积量增加,过长的沉积时间则会造成蚀孔的堵塞,比容得不到提高,最优沉积时间应控制在15min左右为宜。
[Abstract]:Aluminum electrolytic capacitor is a kind of electronic component which is difficult to integrate in integrated circuit, and high specific capacitance is always the research direction.In recent years, the demand for ultra-high voltage aluminum electrolytic capacitors has become more and more urgent. The ultra-high voltage anode foil is the key material for the preparation of ultra-high voltage aluminum electrolytic capacitors, which determines the specific capacitance of aluminum electrolytic capacitors and other electrical properties.In this paper, the influence of corrosion conditions and corrosion inhibitor on the specific volume of anodic foil for ultra-high voltage aluminum electrolytic capacitor was studied, and the high dielectric constant composite oxide film was prepared.The effect of EHV on the specific volume of anode foil was studied.The effects of temperature, current density and time concentration of Al _ 3 on the specific capacity of anode foil for ultra-high voltage aluminum electrolytic capacitor were studied by orthogonal method.The results of orthogonal experiment show that the effect of temperature on the specific volume of ultra-high voltage anodic foil is the biggest, and the effect of current density and pore time on the concentration of Al _ 3 is the least.The effect of the process conditions on the specific capacity and voltage resistance of the ultra-high voltage anodic foil was studied. The optimum process parameters of the anodic foils were as follows: [Cl-] / [SO42-] 1 mol/L/3 mol/L and 0.2mol/LAl3 in the mixed solution of 75 鈩,
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