K9光学玻璃湿式化学机械磨削及其磨具的研究

发布时间：2018-04-22 02:20

  本文选题：K9光学玻璃 + 湿式化学机械磨削　； 参考：《大连理工大学》2015年硕士论文

【摘要】：K9光学玻璃的物理、化学性能稳定,尤其具有良好光学加工性能,因此被广泛应用于光学仪器、高档工艺品等多个领域。其表面精度直接影响到仪器的使用的性能。然而由于K9光学玻璃的硬脆特性,使得传统的加工方法极难获得高质量的光洁表面。本文为获取高表面精度的K9光学玻璃,研究了潮湿环境下的化学机械磨削(Chemical Mechanical Grinding, CMG)加工方法。本文首先研究了磨具的制作工艺,之后针对K9光学玻璃的材料特性进行了干式化学机械磨削试验。使用三维表面轮廓仪测取K9光学玻璃的表面粗糙度,通过精密电子天平称量,间接获得工件的材料去除率。然后在干式化学机械磨削的基础上采用超声雾化去离子水等液体的方法为潮湿试验创造环境,对比干式、潮湿环境下的试验结果对磨具配方进行了调整。通过向一定量的去离子水中添加不同质量的NaHC03来控制水雾的碱性,然后针对调整后的配方制成的磨具开展不同潮湿环境下的化学机械磨削试验。开展了多因素正交试验,研究雾化液的碱性、工件转速、磨具转速等因素对优选出的Ce02型CMG磨具磨削K9玻璃的磨削效果的影响规律。结果表明在磨削液为弱碱性、磨具转速为600r/min、工件转速为250r/min时取得最佳的磨削效果,得到的工件表面最小粗糙度为Ra 0.515nm,获取的最大材料去除率为95.37nm/min。磨削参数对工件表面粗糙度影响程度为：雾化液酸碱度最强,磨具转速次之,工件转速最弱；对平均材料去除率的影响程度为：雾化液酸碱度最强,工件转速次之,磨具转速最弱。潮湿环境下磨削后的K9光学玻璃的加工表面检测后无划痕等缺陷；并在潮湿环境下磨屑的成分中发现新的物质产生,验证了磨削过程中发生化学反应。最后提出了潮湿环境下CMG磨具加工K9光学玻璃过程中的材料去除模型。
[Abstract]:K9 optical glass has stable physical and chemical properties, especially good optical processing properties, so it is widely used in many fields such as optical instruments, high-grade handicrafts and so on. The surface accuracy directly affects the performance of the instrument. However, due to the hard and brittle properties of K9 optical glass, it is very difficult to obtain high quality smooth surface by traditional processing methods. In order to obtain K9 optical glass with high surface accuracy, the chemical mechanical grinding method for chemical Mechanical grinding (CMG) was studied in this paper. In this paper, the manufacturing process of grinding tools is studied firstly, and then dry chemical mechanical grinding experiments are carried out for K9 optical glass. The surface roughness of K9 optical glass was measured by using 3D surface profilometer, and the material removal rate of the workpiece was obtained indirectly by weighing the precision electronic balance. On the basis of dry chemical mechanical grinding, ultrasonic atomizing deionized water and other liquids are used to create the environment for wet test. The formula of grinding tools is adjusted by comparing the test results under dry and wet conditions. The alkalinity of water mist was controlled by adding NaHC03 of different quality to a certain amount of deionized water, and then the chemical mechanical grinding experiments were carried out under different wet conditions for the abrasives made by adjusting the formula. Multi-factor orthogonal test was carried out to study the influence of atomization solution alkalinity, workpiece speed and grinding tool speed on the grinding effect of Ce02 type CMG grinding tool for grinding K9 glass. The results show that the best grinding effect is obtained when the grinding fluid is weak alkaline, the rotational speed of grinding tool is 600r / min, and the rotational speed of workpiece is 250r/min. The minimum surface roughness of the workpiece is Ra 0.515 nm, and the maximum material removal rate is 95.37 nm / min. The degree of influence of grinding parameters on workpiece surface roughness is as follows: the acidity and basicity of atomized liquid is the strongest, the rotation speed of grinding tool is the second, the speed of workpiece is the weakest, and the influence on the average material removal rate is as follows: the acidity of atomized liquid is the strongest, and the rotation speed of workpiece is the second. Grinding tools rotate at the weakest speed. There are no scratches and other defects in the machined surface of K9 optical glass after grinding in wet environment, and new substances are found in the components of grinding debris in wet environment, which verifies the chemical reaction in grinding process. Finally, the material removal model of K 9 optical glass processing with CMG abrasives in wet environment is proposed.
【学位授予单位】：大连理工大学
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：TQ171.734

【参考文献】

中国期刊全文数据库 前5条

1 郝拉娣;张娴;刘琳;;科技论文中正交试验结果分析方法的使用[J];编辑学报;2007年05期

2 宋晓岚;李宇q;江楠;屈一新;邱冠周;;化学机械抛光技术研究进展[J];化工进展;2008年01期

3 仇中军,张飞虎,谢大纲;应用ELID技术进行微晶玻璃超精密磨削[J];金刚石与磨料磨具工程;2002年01期

4 杨改霞;何佳正;谢武;苏冬;;光学玻璃加工用水基润滑冷却液的研制与应用[J];润滑与密封;2011年12期

5 董伟;;化学机械抛光技术研究现状及进展[J];制造技术与机床;2012年07期

中国硕士学位论文全文数据库 前1条

1 王斌;K9光学玻璃化学机械磨削用磨具的研制及性能研究[D];大连理工大学;2013年

，

本文编号：1785174