电弧离子镀CrN膜层制备及性能研究

发布时间：2018-05-28 13:33

本文选题：CrN膜层 + 电弧离子镀　；参考：《昆明理工大学》2017年硕士论文

【摘要】：CrN涂层因具有高硬度、低的内应力、良好的韧性、耐磨损等优异性能,在如汽车、船舶、航空航天等领域得到广泛应用。随着材料服役环境更加苛刻,传统的单相CrN等在硬度、耐磨性等方面无法满足使用工况。研究发现通过控制制备参数及膜层体系得到高硬度、高韧性低以及摩擦系数低的纳米多层膜能够改善其抗摩擦磨损性能,但是随着涂层厚度增加,涂层内应力的增加,影响涂层与基体的结合力。因此,制备大厚度、高结合力、耐磨损性能好的CrN膜层成为时下的研究重点。本文采用真空阴极电弧离子镀技术制备CrN膜层,首先通过正交试验法对气压、靶电流及负偏压进行优化,得到CrN薄膜最佳制备工艺;以此为基础,制备不同厚度CrN单层膜。然后,改变Cr/CrN多层膜调制周期并对其进行优化;以最佳调制周期为基础,增加沉积时间,制备不同厚度的Cr/CrN多层膜,检测基本性能,重点对各膜层磨损率及与基体的结合力进行研究,结果表明:1)本实验CrN薄膜最佳制备工艺参数为气压1.4 Pa、靶电流100 A、偏压-100 V。2)随着膜层厚度的增加,CrN单层膜表面质量急剧下降;CrN膜层硬度逐渐增加;膜层与基体的结合强度急剧降低,膜层厚度在20μm时膜层结合力仅为13N;膜层磨损率急剧升高。3)随着调制周期的减小,Cr/CrN多层膜截面致密性逐渐升高;不同调制周期Cr/CrN多层膜与基体结合力均在100 N以上,同时调制周期为321 nm的Cr/CrN多层膜附着性及韧性最佳;不同调制周期的Cr/CrN多层膜硬度相近;不同调制周期的Cr/CrN多层膜磨损率在2-4×10-6 mm3/N·m范围,调制周期为569 nm的Cr/CrN多层膜磨损率相对较低。4)随着膜层厚度的增加,Cr/CrN多层膜表面质量逐渐下降,但膜层致密性均良好;Cr/CrN多层膜韧性及结合强度相近,且与基体结合强度均在100 N以上;Cr/CrN多层膜的磨损在同一水平上小幅度升高。5)CrN单层膜的摩擦过程中以磨粒磨损为机理,而Cr/CrN多层膜摩擦过程以滑动摩擦磨损为主;膜层厚度在10 μm以上,Cr/CrN多层膜磨损率为CrN单层膜磨损率的1/4。
[Abstract]:CrN coating has been widely used in automobile, ship, aerospace and other fields because of its excellent properties such as high hardness, low internal stress, good toughness and wear resistance. With the material service environment more harsh, the traditional single-phase CrN in hardness, wear resistance and other aspects can not meet the operating conditions. It is found that the nano-multilayer films with high hardness, low toughness and low friction coefficient can improve their friction and wear resistance by controlling the preparation parameters and the coating system. However, with the increase of coating thickness, the internal stress of the coating increases. The adhesion between coating and substrate is affected. Therefore, the preparation of CrN films with large thickness, high adhesion and good wear resistance has become the focus of research. In this paper, the CrN film was prepared by vacuum cathode arc ion plating. Firstly, the air pressure, target current and negative bias voltage were optimized by orthogonal test, and the optimal preparation process of CrN thin film was obtained, on the basis of which, different thickness CrN monolayer films were prepared. Then, the modulation period of Cr/CrN multilayer film is changed and optimized, based on the optimal modulation period, the deposition time is increased, and the Cr/CrN multilayer films with different thickness are prepared, and the basic properties are tested. The wear rate of each film and its adhesion to the substrate were studied. The results show that the optimum preparation parameters of CrN thin films in this experiment are as follows: pressure 1.4 Pa, target current 100A, bias voltage -100V. 2) with the increase of film thickness, the surface quality of CRN monolayer decreases sharply and the hardness of CRN film increases gradually. When the thickness of the film is 20 渭 m, the adhesive force of the film is only 13N, and the wear rate of the film increases sharply. 3) with the decrease of modulation period, the compactness of Cr-CrN multilayer cross section increases gradually. The adhesion and toughness of Cr/CrN multilayer films with different modulation periods are all over 100N, and the adhesion and toughness of Cr/CrN multilayers with modulation period of 321nm are the best, and the hardness of Cr/CrN multilayer films with different modulation periods is similar. The wear rate of Cr/CrN multilayer films with different modulation periods is in the range of 2-4 脳 10-6 mm3/N m, and the wear rate of Cr/CrN multilayer films with modulation period of 569nm is relatively low. 4) the surface quality of Cr-Cr-CrN multilayer films decreases with the increase of film thickness. However, the compactness of the film is good and the toughness and bonding strength of the multilayer Cr / CrN film are similar, and the wear of Cr-CrN multilayer film increases slightly at the same level. The wear mechanism of the Cr / CrN multilayer film is the abrasive wear mechanism in the friction process of the single layer of Cr / CrN film. The friction process of Cr/CrN multilayer film is mainly sliding friction and wear, and the wear rate of Cr-CrN multilayer film with thickness more than 10 渭 m is 1 / 4 of that of CrN monolayer film.
【学位授予单位】：昆明理工大学
【学位级别】：硕士
【学位授予年份】：2017
【分类号】：TQ153

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